M. Hiramatsu, and M. Hori (INVITED
) Fabrication of carbon nanowalls by radical controlled plasma process International Conference on Experimental Condensed Matter Physics (Advanced Nano Materials 2007), Indian Institute of Technology Bombay, Powai, Mumbai, India, January 8-10, 2007
M. Hori (INVITED
) VUV Micro-Hollow Cathode Optical Probes for Space Resolved Absorption Measurements of Radicals in Smart Nanomaterial Processing 7th Workshop on Frontiers in Low Temperature Plasma Diagnostics, Bishop Burton College, Beverley, UK, April 1-5, 2007
M. Hori (INVITED
) Advanced Plasma Cleaning and Surface modification Technology on Flexible Materials, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 4-5
M. Hori (INVITED
) Plasma Etching Technology for Low-k Porous SiOCH Films, 211th ECS Meeting, Hilton Chicago, Chicago, USA, May 6-11, 2007. E3-684
M. Hori (INVITED
) Micro and Nano-Fabrication Processing on the Basis of Plasma Science, The 9th International Symposium on Sputtering and Plasma Processes (ISSP 2007), Kanazawa Kokusai Hotel, Kanazawa, Japan, June 6-8, 2007. pp. 11-16
M. Hori (INVITED
) Low-Temperature Formation of Microcrystalline Si Films and Their Application to TFTs for Flexible Displays 14th International Workshop on Active-Matrix Flat Panel Displays and Devices-TFT Technologies and Related Materials- (AM-FPD07), Awaji Yumebutai International Conference Center, Awaji, Japan, July 11-13, 2007
M. Hori (INVITED
) Porous Low-k SiOCH Etching Technology by High-Precision Radical Control, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30C-p1
M. Hori (INVITED
) Generation Mechanism of Etching Damages on Low-k SiOCH Films and Development of Novel Damage Evaluation Technique, 2007 International Conference on Solid State Devices and Materials (SSDM), EPOCHAL TSUKUBA, Tsukuba, Japan, September 19-21, 2007. pp. 260-261
M. Hori (INVITED
) Summary and Discussion on Flat-Panel and Flexible Devices 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007) Workshop on Flat-Panel and Flexible Devices, Yasuragi-Ioujima, Nagasaki, Japan, September 28, 2007
M. Hori (INVITED
) Synthesis of Carbon Nanowalls and Challenge for New Functional Devices, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. LW1.00003
M. Hori (INVITED
) Autonomously Controlled Fabrication Processing in Low-Pressure and Atmospheric-Pressure Plasmas with Radical Diagnostics, International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, Osaka University, Osaka, Japan, October 15-17, 2007. pp. 29-30
M. Hori (INVITED
) Surface Cleaning Process and Its Reaction Mechanism for Flexible Electronics Employing Atmospheric Pressure N2/O2 Plasma, 2007 Trans-Pacific Workshop on Flexible Electronics, University of Texas at Dallas, Richardson, TX, USA, December 3, 2007. p. 8
M. Hori, and M. Hiramatsu (INVITED
) Plasma Nano-Processing for Fabrication of New Functional Graphene Sheet Nano-Devices, 5th International Conference on Advanced Materials and Devices, Ramada Plaza Jeju Hotel, Jeju, Korea, December 12-14, 2007. p. 31
General
M. Hiramatsu T. Deguchi, and M. Hori. Aligned growth of single-walled carbon nanotube films by the control of catalyst preparation International Conference on Experimental Condensed Matter Physics (Advanced Nano Materials 2007), Indian Institute of Technology Bombay, Powai, Mumbai, India, January 8-10, 2007. (
)
H. Ju, T. Ohta, S. Takao, M. Ito, M. Sasaki, K. Hane, M. Hori. The silicon mold fabrication of a kind of micro-optical resonator and coupler SPIE Photonics West 2007, San Jose convention center, San Jose, USA, January 20-25, 2007. (
)
W. Takeuchi, M. Ura, Y. Tokuda, H. Kano, and M. Hori. Growth and Properties of Carbon Nono Walls (CNW) Using Radical Injection PECVD, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 56-57 (
)
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Kano, H. Toyoda, H. Sugai, and M. Hori. Development and Characteristics of Fast N Radical Source, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 59-62 (
)
S. Uchida, S. Takashima, M. Hukasawa, K. Ohshima, K. Nagahata, T. Tatsumi, and M. Hori. Evaluation of Plasma Induced Damages on Low-k Films, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 64-66 (
)
K. Takeda, S. Takashima, and M. Hori. Measurement of Absolute O (1D2) Atom Density in O2 Surface Wave Plasma Diluted by Rare Gas with Vacuum Ultraviolet Laser Absorption Spectroscopy, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 93-95 (
)
M. Iwasaki, M. Ito, T. Yara, T. Uehara, and M. Hori. Gas Phase Diagnostics in Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma for SiO2 Etching and Glass Cleaning for Surface, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 96-98 (
)
S. Takahashi, S. Den, T. Katagiri, R. Kawauchi, H. Kano, M. Ito, T. Suzuki, and M. Hori. Improvement of Electrical Characteristic and Mechanical Flexibility of Organic TFT Using Multi-Functional Organic Interlayer, 5th International Symposium on Advanced Plasma Processes and Diagnostics and 1st International Symposium on Flexible Electronics Technology, Sungkyunkwan University, Suwon, Korea, April 6-7, 2007. pp. 107-109 (
)
H. Yamamoto, S. Takashima, K. Takeda, R. Kawauchi, S. Takahashi, S. Den , M. Sekine, and M. Hori. Etching of Organic Low Dielectric Constant Film in 100MHz Capacitively Coupled H2/N2 Gases Plasmas, 28th International Conference on Phenomena in Ionized Gases, Congress Center, Prague, Czech Republic, July 15-20, 2007. pp. 813-816 (
)
T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, and M. Hori. Development of Multi metallic Emission Array using Micro Hollow Cathode Plasma, 28th International Conference on Phenomena in Ionized Gases, Congress Center, Prague, Czech Republic, July 15-20, 2007. pp. 1235-1238 (
)
K. Takeda, S. Takashima, and M. Hori. Generation Processes of O (3Pj) and O (1D2) Atoms in Oxygen and Krypton Mixture Surface Wave Excited Plasma, 28th International Conference on Phenomena in Ionized Gases, Congress Center, Prague, Czech Republic, July 15-20, 2007. pp. 1690-1693 (
)
M. Hori, S. Takahashi, K. Takeda, and S. Takashima. Development of Compact Radical Monitoring Probe for Smart Nano Plasma Processing, 28th International Conference on Phenomena in Ionized Gases, Congress Center, Prague, Czech Republic, July 15-20, 2007. pp. 1694-1696 (
)
M. Hori. Industrial Application of Infrared Diode Laser Absorption Spectroscopy, 1st International Summer School on Infrared Plasma Spectroscopy, Institute of Low Temperature Plasma Physics, Greifswald, Germany, July 23-24, 2007. Tutorial III (ORAL
)
K. Takeda, T. Ohta, S. Takashima, M. Ito, N. Nishizawa, and M. Hori. Near Infrared Absorption Spectroscopy with Supercontinuum Light for Measurement of Species in Non-Equilibrium Atmospheric Pressure Plasma, 2nd Workshop on Infrared Plasma Spectroscopy, Institute of Low Temperature Plasma Physics, Greifswald, Germany, July 24-27, 2007. pp. 17-18 (
)
T. Takahashi, S. Takashima, K. Yamakawa, S. Den, H. Kano, M. Ito, and M. Hori. Radical Monitoring Probe for Measurements of H, N, O and C Atomic Radical Densities in Reactive Process Plasmas, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30P-12 (
)
K. Takeda, S. Takashima, and M. Hori. Effect of Behaviors of Activated Species on Si Oxidation in Ar Diluted O2 Surface Wave Plasma on Production Level, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30P-13 (
)
M. Iwasaki, M. Ito, T. Yara, T. Uehara, and M. Hori. Gas Phase Diagnostics in Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma for Glass Cleaning, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30B-a4 (
)
H. Sasaki, S. Takashima, and M. Hori. Measurement of Absolute Carbon Atom Density in Reactive Plasma Using Vacuum Ultraviolet Absorption Spectroscopy, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 28P-57 (
)
T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashizima, H. Kano, S. Den, and M. Hori. Plasma Diagnostics on Multi-Micro Hollow Light Source, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 28P-113 (
)
T. Ideno, H. Inui, H. Fujiwara, A. Masuda, M. Kondo, M. Hiramatsu, and M. Hori. Silicon Dicing Process Using and Atmospheric-Pressure Microplasma, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 28P134 (
)
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Kano, H. Toyoda, H. Sugai, and M. Hori. Development and Characteristics of Fast Radical Source, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27B-a5 (
)
M. Li, T. Matsubara, K. Takeda, Y. Masumoto, T. Mori, S. Tada, H. Hayakawa, and M. Hori. Formation of SiN Films on Si Substrates and OLEDs at Low Temperature Using VHF-CCP and Improvement of the Properties, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27C-p2 (
)
S. Takashima, S. Uchida, M. Fukasawa, K. Ohshima, K. Nagahata, T. Tatsumi, and M. Hori. Plasma Etching Damages on Low-k Films due to VUV Light, UV Light, Radicals and Ions, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30C-p2 (
)
K. Yamakawa, S. Den, T. Katagiri, H. Kano, M. Hiramatsu, and M. Hori. High Speed Growth Process of Carbon Nanowalls Using Radical Injection Plasma CVD, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30P-111 (
)
E. Shibata, H. Sasaki, H. Okamoto, and M. Hori. Porous Low-k Film Etching Process and Its Diagnostics Employing and Alternative Fluorocarbon Gas, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30P-114 (
)
S. Kondo. K. Yamakawa, M. Hiramatsu, and M. Hori. Etching Properties of Carbon Nanowalls Fabricated Using Radical Injection Plasma Enhanced CVD, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-42 (
)
W. Takeuchi, M. Ura, Y. Tokuda, M. Hiramatsu, H. Kano, and M. Hori. The Structure and Electric Conduction of Carbon Nanowalls using Radical Injection Plasma Enhanced CVD, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-43 (
)
A. Noda, M. Hiramatsu, and M. Hori. Transcription of Carbon Nanowall Pattern into SiO2 Film, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-44 (
)
T. Obayashi, K. Yamakawa, H. Kano, M. Hiramatsu, and M. Hori. The Improvement of Field Emissions from Carbon Nanowalls by Hydrogen Plasma Treatment, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 2P-45 (
)
S. Maruyama, K. Yamakawa, H. Kano, M. Hiramatsu, and M. Hori. Effect of Kinds of Substrates on the Growth of Carbon Nanowalls, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-46 (
)
S. Kato, H. Sasaki, S. Takashima, K. Yamakawa, M. Hiramatsu, and M. Hori. Radical Density Measurements in VHF Fluorocarbon/Hydrogen Plasma with Radical Injection used for Carbon Nanowall Fabrication, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-47 (
)
T. Machino, M. Nakamura, K. Yamakawa, M. Hiramatsu, and M. Hori. Carbon Nanowalls with Dispersed Nanometal Particles and Evaluation of the Field Emission Properties, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-48 (
)
T. Mori, M. Hiramatsu, K. Yamakawa, K. Takeda, and M. Hori. Growth of Carbon Nanowalls using Electron Beam Excited Plasma-Enhanced Chemical Vapor Deposition, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-49 (
)
E. Takahashi, Y. Ito, T. Chikyow, and M. Hori. Room Temperature and High Rate Deposition of Silicon Nanoparticles using Pulse-Modulated UHF Plasma, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 30P-148 (
)
S. Iseki, A. Aomatsu, T. Ohta, M. Ito, H. Kano, Y. Higashijima, and M. Hori. Sterilization of Penicillium Digitatum using Nonequilibrium Atmospheric Pressure Plasma, 18th International Symposium on Plasma Chemistry, Kyoto University, Kyoto, Japan, August 26-31, 2007. 27P-109 (
)
S Kato, H Sasaki, S Takashima, K Yamakawa, M Hiramatsu, M Hori. Fabrication of carbon nanowall in VHF fluorocarbon/hydrogen plasma with plasma enhanced CVD, 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides, Berlin, Germany, September 9-14, 2007. P2.13.11 (
)
T Mori, M Hiramatsu, K Yamakawa, K Takeda, M Hori. Fabrication of carbon nanowalls using electron beam excited plasma, 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides, Berlin, Germany, September 9-14, 2007. P2.13.09 (
)
K. Yoshimura, and M. Hori. Technology of Radical Monitoring and Its Application to Plasma Nano Processes ALTECH 2007 ECS Satellite Symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, University Munich, Munich, Germany, September 13-14, 2007. (
)
K. Takeda, S. Takashima, and M. Hori. Si Oxidation Mechanism in Ar/O2 Surface Wave Plasma, 2007 International Conference on Solid State Devices and Materials (SSDM), EPOCHAL TSUKUBA, Tsukuba, Japan, September 19-21, 2007. pp. 326-327 (
)
W. Takeuchi, M. Ura, Y. Tokuda, M. Hiramatsu, H. Kano, and M. Hori. Control of Electric Conduction of Carbon Nanowalls, 2007 International Conference on Solid State Devices and Materials (SSDM), EPOCHAL TSUKUBA, Tsukuba, Japan, September 19-21, 2007. pp. 710-711 (
)
T. Mori, M. Hiramatsu, K. Yamakawa, K. Takeda, M. Hori. Synthesis of carbon nanowalls using electron beam excited plasma enhanced chemical vapor deposition, 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Yasuragi-Ioujima Nagasaki, Japan, September 24-29, 2007. OR0601 (
)
H. Inui, T. Ideno, H. Fujiwara, A. Masuda, M. Kondo, M. Hiramatsu, M. Hori. Silicon slice using atmospheric pressure microplasma, 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Yasuragi-Ioujima Nagasaki, Japan, September 24-29, 2007. P1056 (
)
S. Kato, H. Sasaki, S. Takashima, K. Yamakawa, M. Hiramatsu, M. Hori. Radical density measurements in VHF C2F6/H2 plasma with radical injection CVD used for carbon nanowall fabrication, 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Yasuragi-Ioujima Nagasaki, Japan, September 24-29, 2007. P4013 (
)
T. Deguchi, M. Hiramatsu, M. Hori. Fabrication of single-walled carbon nanotube film with self-assembled conical tips using microwave plasma-enhanced CVD, 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Yasuragi-Ioujima Nagasaki, Japan, September 24-29, 2007. P4017 (
)
Noda, M. Hiramatsu, M. Hori. Pattern transfer of carbon nanowall into SiO2 film, 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Yasuragi-Ioujima Nagasaki, Japan, September 24-29, 2007. P4018 (
)
S. Kondo, O. Stepanovic, K. Yamakawa, M. Hiramatsu, and M. Hori. Growth Process of Carbon Nanowalls Fabricated Using Radical Injection Plasma Enhanced Chemical Vapor Deposition, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. LW1.00004 (
)
M. Hiramatsu, T. Mori, and M. Hori. Fabrication of Vertically Standing Carbon Nanowalls by Electron Beam Excited Plasma-Enhanced CVD, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. LW1.00005 (
)
T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, and M. Hori. Development of Light Source using Micro Hollow Cathode Plasma for Monitoring Absolute Densities of Metal Atoms in Magnetron Sputtering, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. MWP1.00040 (
)
M. Iwasaki, K. Takeda, and M. Hori. Measurement of Ground State Oxygen Radical [O(3P)] in Surface Cleaning Process Employing Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. MWP1.00049 (
)
K. Takeda, S. Takashima, and M. Hori. Behavior of Excited Oxygen Atoms in Rare gas mixture O2 Surface Wave Excited Plasma, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. SRP1.00021 (
)
M. Hiramatsu, S. Kato, H. Sasaki, W. Takeuchi, S. Kondo, K. Yamakawa, and M. Hori. Radical Density Measurement in VHF C2F6/H2 Plasma used for Carbon Nanowall Growth, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. SRP1.00022 (
)
W. Takeuchi, Y. Tokuda, M. Hiramatsu, H. Kano, and M. Hori. Control of Structures of Carbon Nanowalls in Plasma Enhanced CVD, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. VF1.00007 (
)
H. Sasaki, S. Takashima, and M. Hori. Measurement of Absolute Carbon Atom Density in Reactive Plasmas using Vacuum Ultraviolet Absorption Spectroscopy with Microdischarge Hollow Cathode Lamp, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. WF2.00002 (
)
S. Takahashi, S. Takashima, K. Yamakawa, S. Den, H. Kano, and M. Hori. Optical Probe for Space Resolved Measurement of Atom Densities in Reactive Plasmas, 60th Annual Gaseous Electronics Conference (GEC), DoubleTree Crystal City-National Airport, Arlington, VA, USA, October 2-5, 2007. WF2.00003 (
)
S. Kondo, K. Yamakawa, M. Hiramatsu, M. Hori. Study of Growth Process and Structures of Carbon Nanowalls Synthesized Using Radical Injected Plasma Enhanced CVD, 54th International Symposium American Vacuum Society (AVS), Washington State Convention Center, Seattle, WA, USA, October 14-19, 2007. TF-TuM1 (
)
W. Takeuchi, M. Ura, Y, Tokuda, M. Hiramatsu, H. Kano, M. Hori. Evaluation and Control of Electric Conduction of Carbon Nanowalls Fabricated by Plasma-Enhanced CVD, 54th International Symposium American Vacuum Society (AVS), Washington State Convention Center, Seattle, WA, USA, October 14-19, 2007. TF-TuM1 (
)
M. Fukasawa, T. Tatsumi, K. Nagahata, S. Uchida, S. Takashima, M. Hori. SiOCH Damage in N2/H2 Plasma, 54th International Symposium American Vacuum Society (AVS), Washington State Convention Center, Seattle, WA, USA, October 14-19, 2007. PS1-TuA2 (
)
S. Uchida, S. Takashima, M. Hori, M. Fukasawa, K, Nagahata, T. Tatsumi. Evaluation of Plasma Damage due to VUV Light, UV Light, Radicals, Ions and Interaction of Light and Radicals on Low-k Films, 54th International Symposium American Vacuum Society (AVS), Washington State Convention Center, Seattle, WA, USA, October 14-19, 2007. PS1-TuA5 (
)
S. Takashima, S. Takahashi, K. Yamakawa, S. Den, H. Kano, M. Hori. Development of Atomic Radical Monitoring Probe for Spatial Distribution Measurements and its Application to Reactive Plasma Processes, 54th International Symposium American Vacuum Society (AVS), Washington State Convention Center, Seattle, WA, USA, October 14-19, 2007. PS1-ThA1 (
)
T. Obayashi, K. Yamakawa, H. Kano, M. Hiamatsu, and M. Hori. Field Emission from Carbon Nanowalls with MgO Coating, International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, Osaka University, Osaka, Japan, October 15-17, 2007. pp. 123-124 (
)
E. Takahashi, and M. Hori. Room Temperature Deposition of Silicon Nanoparticles using Pulse-Modulated UHF Plasma, International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, Osaka University, Osaka, Japan, October 15-17, 2007. pp. 125-126 (
)
M. Hori, and M. Hiramatsu. Carbon Nanowall Fabrication using Radical-Controlled Plasma Processing: toward the Application for New Functional Devices 6th Pacific Rim International Conference on Advanced Materials and Processing, ICC Jeju, Jeju, Korea, November 5-9, 2007. (
)
K. Takeda, S. Takashima, and M. Hori. Diagnostics of Oxygen Based Surface Wave Plasmas Diluted by Rare Gas for Low Temperature Silicon Oxidation Processes 6th Pacific Rim International Conference on Advanced Materials and Processing, ICC Jeju, Jeju, Korea, November 5-9, 2007. (
)
S. Kondo, A. Noda, K. Yamakawa, S. Den, M. Hiramatsu, and M. Hori. Etching Processes of Carbon Nanowalls using Dual-Frequency Parallel-Plate Capacitively Coupled Plasma, 20th International Microprocesses and Nanotechnology Conference, Kyoto International Conference Center, Kyoto, Japan, November 5-8, 2007. pp. 162-163 (
)
E. Shibata, H. Okamoto, and M. Hori. Environmental-Friendship Etching Process of Low-k SiOCH Films Employing and Alternative Fluorocarbon Gas, 20th International Microprocesses and Nanotechnolgy Conference, Kyoto International Conference Center, Kyoto, Japan, November 5-8, 2007. pp. 252-253 (
)
S. Maruyama, K. Yamakawa, H. Kano, M. Hiramatsu, and M. Hori. Morphology Control of Carbon Nanowalls using Radical Injection Plasma Enhanced CVD, 5th International Symposium on Control of Semiconductor Interfaces, Tokyo Metropolitan University Minami-Osawa Campus, Tokyo, Japan, November 12-14, 2007. pp. 79-80 (
)
H. Yamamoto, S. Takahashi, R. Kawauchi, S. Den, S. Takashima, M. Sekine, and M. Hori. Control of Organic Low-k Etching in 100MHz Capacitively Coupled H2/N2 Plasma Employing a Radical Sensor, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 91-92 (
)
E. Shibata, H. Okamoto, and M. Hori. High Performance Etching of Porous Low-k SiOCH Employing an Alternative Fluorocarbon Gas, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 93-94 (
)
S. Takashima, S. Takahashi, H. Kano, K. Yamakawa, S. Den, M. Sekine, and M. Hori. Space Resolved Density Measurements in Reactive Plasmas using Optical Probe for Atomic Radical Monitoring, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 163-164 (
)
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Kano, H. Toyoda, M. Sekine, and M. Hori. Development and Characteristics of Nitrogen Radical Beam, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 171-172 (
)
S. Uchida, S. Takashima, M. Sekine, M. Fukasawa, K. Ohshima, K. Nagahata, T. Tatsumi, and M. Hori. Evaluation of Plasma Damages on Organic Low-k Film due to VUV Light, UV Light, Radicals and Ions, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 179-180 (
)
T. Hishikawa, M. Hiramatsu, and M. Hori. Growth of Carbon Nanowalls using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition, 29th International Symposium on Dry Process (DPS), Tokyo International Exchange Center, Tokyo, Japan, November 13-14, 2007. pp. 253-254 (
)