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2009

  1. T. Machino, W. Takeuchi, H. Kano, M. Hiramatsu, and M. Hori
    Synthesis of Platinum Nanoparticles on Two-Dimensional Carbon Nanostructures with an Ultrahigh Aspect Ratio Employing Supercritical Fluid Chemical Vapor Deposition Process
    Applied Physics Express, Vol. 2 (2) (January 23, 2009) 025001 pp. 1-3,
    DOI: 10.1143/APEX.2.025001

  2. Chang Sung Moon, Keigo Takeda, Makoto Sekine, Yuichi Setsuhara, Masaharu Shiratani, and Masaru Hori
    Combinatorial Plasma Etching Process
    Applied Physics Express, VOl. 2 (2009) 096001 pp. 1,
    DOI: 10.1143/APEX.2.096001

  3. T. Ohta, C. Koshimizu, K. Kawasaki, K. Takeda, and M. Ito
    Simultaneous Measurement of Substrate Temperature and Thin-Film Thickness on SiO2 /Si Wafer using Optical-Fiber-Type Low-Coherence Interferometry
    Journal of Applied Physics, Vol. 105 (January 13, 2009) 013110 pp. 1-7,
    DOI: 10.1063/1.3058592

  4. W. Takeuchi, H. Sasaki, S. Kato, S. Takashima, M. Hiramatsu, and M. Hori
    Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas
    Journal of Applied Physics, Vol. 105 (June 8, 2009) 113305 pp. 1-6,
    DOI: 10.1063/1.3091279

  5. S. Takahashi, S. Takashima, K. Yamakawa, S. Den, H. Kano, K. Takeda, and M. Hori
    Development of atomic monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing
    Journal of Applied Physics, Vol. 106 (5) (September 9, 2009) 053306 pp. ,
    DOI: 10.1063/1.3212990

  6. S. Kondo, S. Kawai, W. Takeuchi, K. Yamakawa, S. Den, H. Kano, M. Hiramatsu, and M. Hori
    Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition
    Journal of Applied Physics, Vol. 106 (November 5, 2009) 094302 pp. 1,
    DOI: 10.1063/1.3253734

  7. Wakana Takeuchi, Keigo Takeda, Mineo Hiramatsu, Yutaka Tokuda, Hiroyuki Kano, Shigeru Kimura, Osami Sakata, Hiroo Tajiri, and Masaru Hori
    Monolithic self-sustaining nanographene sheet grown using plasma-enhanced chemical vapor deposition
    Physica Status Solidi A, Vol. 207, pp. 139-143 (September 17, 2009) pp. 139-143 ,
    DOI: 10.1002/pssa.200925230

  8. Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe, M. Shiratani, M. Sekine, M. Hori, E. Ikeitaga, H. Kondo, O. Nakatsuka, and S. Zaima
    Plasma Surface Treatment of Polymers with Inductivity Coupled RF Plasmas Driven by Low inductance Antenna Units
    Thin Solid Films, Vol. 518 (2009) pp. 1006-1011,
    DOI: 10.1016/j.tsf.2009.07.161

  9. Y. Setsuhara, K. Nagao, M. Shiratani, M. Sekine, and M. Hori
    Development of d ensity-inclination plasmas for analysis of plasma nano-processes via combinatorial method
    Thin Solid Films, Vol. 518 (2009) pp. 1020-1023,
    DOI: 10.1016/j.tsf.2009.07.162

  10. A. Malinowski, M. Sekine, M. Hori, A. Jakubowski, L. Lukasiak, and D. Tomaszewski
    Analysis of dispersion of electrical parameters and characteristics of FinFET devices
    Journal of Telecommunications and Information Technology (JTIT) issue No 4 (September 24, 2009) pp. 45-50,
    DOI:

  11. Jun Umetsu, Kazuhiko Inoue, Takuya Nomura, Hidefumi Matsuzaki, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara, Makoto Sekine, and Masaru Hori
    Substrate temperature dependence of deposition profile of plasma CVD carbon films in trenches
    J. Plasma Fusion Res. SERIES, Vol. 8 (2009) pp.1443-1446,
    DOI:

  12. Wakana Takeuchi, Hiroki Kondo, and Masaru Hori
    Analyses on Crystalline Structures of Carbon Nanowalls by Grazing-Incidence X-Ray Diffraction Using Synchrotron Light Source
    SPring-8 Research Frontier 2009 (2009) pp. 62-63,
    DOI:

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