Invited talk



    General

    1. K. Yamada, S. Kato, M. Hiramatsu, M. Nawata, M. Hori, and T. Goto.
      Effects of OH, H and CH3 Radicals on Diamond Film Formation Using a Parallel-Plate RF Plasma,
      Symposium on Diamond Electronics Devices, Osaka, Japan, March, 1996. p. 48 ( )

    2. M. Hori, M. Inayoshi, T. Goto, and M. Hiramatsu.
      Surface Reaction of CF2 Radical in Fluorocarbon Plasma Etching Process,
      189th Spring Meeting of The Electrochemical Society (ECS), Los Angels, USA, May, 1996. p. 229 ( )

    3. K. Miyata, M. Ito, M. Hori, T. Goto, Y. Hayashi, and Y. Sakamoto.
      CF and CF2 Radical Chemistry in the Gaseous Phase of a Compact Permanent Magnet ECR Plasma Source,
      189th Spring Meeting of The Electrochemical Society (ECS), Los Angels, USA, May, 1996. p. 298 ( )

    4. M. Ito, R. Nozawa, H. Takeda, M. Hori, and T. Goto.
      Effects of Ions on Surface Morphology and Structures of Polycrystalline Silicon Films Prepared by Electron Cyclotron Resonance Silane/Hydrogen Plasmas,
      189th Spring Meeting of The Electrochemical Society (ECS), Los Angels, USA, May, 1996. p. 324 ( )

    5. B. P. Singh, K. Ieda, R. Nomura, M. Mori, T. Goto, Y. Uchida, and A. Miyauchi.
      Performance Characteristics of Amplitude-Modulated Harmonically Mode-Locked Er3+ Doped Fiber Ring Laser,
      IEEE Instrumentation and Measurement Technology Conference , Brussels, Belgium, Jun., 1996. pp. 144-149 ( )

    6. S. Den, T. Kuno, K. Miyata, M. Ito, M. Hori, T. Goto, Y. Hayashi, and T. Goto.
      Diagnostics of Fluorocarbon Radicals in a Compact Permanent Magnet ECR etching Plasma,
      Digest of Papers of 9th International Microprocess Conference , Kitakyushu, Japan, July, 1996. pp. 30-31 ( )

    7. M. Inayoshi, M. Hori, T. Goto, and M. Hiramatsu.
      High-Aspect-Ratio Ablation of Polytetrafluoroethylene by Synchrotron Radiation Irradiation,
      Digest of Papers of 9th International Microprocess Conference , Kitakyushu, Japan, July, 1996. pp. 74-75 ( )

    8. T. Goto, and M. Hori.
      Radical Behavior in Fluorocarbon Plasma and Control of Silicon Oxide Etching by Injection of Radical,
      Digest of Papers of 9th International Microprocess Conference , Kitakyushu, Japan, July, 1996. pp. 24-25 ( )

    9. R. Nozawa, H. Takeda, M. Ito, M. Hori, and T. Goto.
      Ion Bombardment Effects on Polycrystalline Silicon Formation in Electron Cyclotron Resonance SiH4/H2 Plasma Enhanced Chemical Vapor Deposition
      3rd Asia-Pacific Conference on Plasma Science and Technology, Tokyo, Japan, July, 1996. ( )

    10. A. Kawasaki, K. Ikai, M. Mori, T. Goto, and A. Miyauchi.
      Gain Grating Method to Control Bragg Wavelengths of Fiber Gratings Formed in Er-Doped Fibers with Holographic Method
      Optoelectronics and Communications Conference, Chiba, Japan, July, 1996. ( )

    11. B. P. Singh, K. Ieda, R. Nomura, M. Mori, and T. Goto.
      Characteristics of Amplitude Modulated Harmonically Mode-Locked Er3+ Doped Fiber Ring Laser
      Optoelectronics and Communications Conference, Chiba, Japan, July, 1996. ( )

    12. N. Nishizawa, M. Mori, T. Goto, and A. Miyauchi.
      Quadrature Squeezed Light Generation with Phase Tunable PBS Fiber Loop Mirror
      Optoelectronics and Communications Conference, Chiba, Japan, July, 1996. ( )

    13. N. Nishizawa, M. Mori, T. Goto, and A. Miyauchi.
      A Simulation of Pulsed Squeezing in Short Optical Fiber Loop Mirror
      3rd International Conference on Quantum Communication and Measurement, Hakone, Japan, September, 1996. ( )

    14. K. Miyata, T. Kuno, M. Hori, and T. Goto.
      CFx(x=1-3) Radical Densities During SiO2, Si3N4 and Si Etching Employing ECR-CHF3 Plasma
      43rd National Symposium of American Vacuum Society (AVS), Philadelphia, PA, USA, October, 1996. ( )

    15. S. Den, T. Kuno, M. Hori, M. Ito, and T. Goto.
      Diagnostics of a Newly Developed 300mm Homogeneous Permanent Magnet ECR Plasma
      43rd National Symposium of American Vacuum Society (AVS), Philadelphia, PA, USA, October, 1996. ( )

    16. M. Ito, K. Murata, H. Ito, M. Hori, and T. Goto.
      STM/STS Characterization of Diamond Films Prepared by RF Plasma CVD with OH Radical Injection
      43rd National Symposium of American Vacuum Society (AVS), Philadelphia, PA, USA, October, 1996. ( )

    17. M. Hori, R. Nozawa, H. Takeda, M. Ito, and T. Goto.
      The Effects of Radicals on the Crystallinity of Polycrystalline Silicon Films Formed by Using ECR SiH4/H2 Plasma
      43rd National Symposium of American Vacuum Society (AVS), Philadelphia, PA, USA, October, 1996. ( )

    18. T. Goto, and M. Hori.
      Behaviors of CFx Radicals in ECR Fluorocarbon Plasmas and Control of SiO2 Etching by Radical Injection
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    19. M. Ikeda, M. Ito, M. Hori, T. Goto, and H. Ito.
      Carbon Radical Measurement in Inductively Coupled CO Plasma
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    20. Y. Yamamoto, S. Suganuma, M. Ito, M. Hori, and T. Goto.
      Behaviors of Si Atoms and SiHx+(x+0-3) Ions in ECR SiH4 Plasma
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    21. K. Miyata, H. Arai, M. Hori, and T. Goto.
      Dissociation Processes of Fluorocarbon in ECR Etching Plasmas
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    22. M. Ito, R. Nozawa, K. Murata, M. Hori, and T. Goto.
      The Roles of Plasma Species on Polycrystalline Silicon Film Formation by ECR SiH4/H2 Plasma
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    23. M. Hori, R. Nozawa, H. Takeda, M. Nakamura, M. Ito, and T. Goto.
      In-situ Surface Diagnostics of a-Si:H Films During ECR-H2 Plasma Annealing
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    24. T. Fujii, T. Yokoi, M. Hiramatsu, M. Nawata, M. Hori, T. Goto, and S. Hattori.
      Oxygen Radical Assisted Laser Evapolation of Polysiloxane for Preparation of Insulating Films with Low Dielecric Constant
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    25. A. Kono, T. Hayashi, S. Hirose, and T. Goto.
      Measurement of Negative Ions in a RF NF3/Ar Plasma
      49th Gaseous Electronics Conference (GEC), Argonne, Ill, USA, October, 1996. ( )

    26. T. Goto, and A. Kono.
      Radical Measurements for RF and ECR Silane Plasmas
      Plasma Forum 1996 at Cheju, Cheju, Korea, November, 1996. ( )

    27. R. Goto, K. Matsui, M. Mori, T. Goto, and A. Miyauchi.
      Source Wavelength Dependence of Modulation Frequency Responses of 1.55-micrometer DSB LD's Measured with Active Layer Photomixing Technique
      International Conference on Fiber Optics and Photonics (Photonics-96), Madras, India, December, 1996. ( )

    28. M. Mori.
      Quadrature Squeezed Light Generation with a Fiber Ring Reflector
      International Conference on Fiber Optics and Photonics (Photonics-96), Madras, India, December, 1996. ( )