Masaru Hori, Jumpei Kurokawa, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine (INVITED
) Internal parameter analysis by random forest model in PECVD of amorphous carbon films First Meeting of the NTC Technical Committee on Emerging Plasma Nanotechnologies(IEEE Nanotechnology Council), online, 2022/2/9
Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Camelia Miron, Hiroaki Kajiyama, Shinya Toyokuni, Masaru Hori (INVITED
) Molecular mechanisms of cell death by plasma-activated solutions in glioblastoma cells, 9th International Conference on Plasma Medicine (ICPM9), Utrecht, The Netherlands, 2022/6/27. I1 D1A1, pp. 8
Hiroaki Kajiyama, Kae Nakamura, Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Shinya Toyokuni, Masaru Hori (INVITED
) The aqueous plasma therapy for ovarian cancer ~Aiming for controlling disseminated peritoneal metastasis~, 9th International Conference on Plasma Medicine (ICPM9), Utrecht, The Netherlands, 2022/6/30. I2 D4B1, pp.20
Hiroki KONDO, Takayoshi TSUTSUMI, Kenji ISHIKAWA, Masaru HORI (INVITED
) Interfacial reaction of gas-liquid plasma in the synthesis of functional carbon nanomaterials, The 5th International Union of Materials Research Societies International Conference of Young Researchers on Advanced Materials(IUMRS-ICYRAM2022), Fukuoka, Japan, 2022/8/4. C-I4-012
Masaru Hori (INVITED
) Development of ultrahigh density non-equilibrium atmospheric pressure plasma and its applications to materials and biotechnology 15th Asia Pacific Physics Conference (APPC15), South Korea, 2022/8/22
Masaru Hori (KEYNOTE
) Plasma-induced Bioactive Substances and their Medical Applications, THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-24, Sapporo Japan, 2022/9/13. Tue-K1-1K (Keynote)
H. Kondo, T. Tsutsumi, K. Ishikawa, M. Sekine, and M. Hori (INVITED
) Synthesis, Functionalization, and Three-Dimensional Structuring of Carbon Nanomaterials By Gas-Liquid Interface Plasma, 242nd ECS Meeting, Atlanta, GA, USA, 2022/10/10. D04-0870
Masaru Hori (PLENARY
) Evolution of Reactive Plasma Processes by Radical Control, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 2022/10/5. 授賞講演
Naohiro Shimizu, Osamu Oda, Ranjit R. Borude, Reiko Tanaka, Kenji Ishikawa, Hiroki Hosoe, Satoshi Ino, Yosuke Inoue, and Masaru Hori (INVITED
) Novel Hydrogen Generation Study Applying Rebound Tailing Pulse and Wet Electrode Methods, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221003. GM2.00004
Takayoshi TSUTSUMI, Hiroki KONDO, Kenji ISHIKAWA, Makoto SEKINE, Masaru HORI (INVITED
) Ion Induced Damage in Plasma Enhanced Atomic Layer Etching Processing, 第32回 日本MRS年次大会, Yokohama, Japan, 20221205. E-I5-014
Hiromasa TANAKA, Masaaki MIZUNO, Kenji ISHIKAWA, Hiroaki KAJIYAMA, Shinya TOYOKUNI, Fumitaka KIKKAWA, Masaru HORI (INVITED
) Plasma-activated solutions in plasma life science, 第32回 日本MRS年次大会, Yokohama, Japan, 20221207. L-I7-003
Masaru Hori (INVITED
) Challenges of Plasma Science and Technology for Green Semiconductor Manufacturing, International Symposium on Semiconductor Manufacturing 2022, Tokyo, Japan, 20221212. Tutorial Speech
General
N. Britun, P. Dennis Christy, V. Gamaleev and M. Hori. Time-resolved dynamics of a ns- atmospheric jet discharge, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022), online, 2022.03.06-10. 08pB06O (ORAL
)
Camelia Miron, Nikolay Britun, Hiroki Kondo, Kae Nakamura, Hiroshi Hashizume, Hiromasa Tanaka, Kenji Ishikawa, and Masaru Hori. Physicochemical Investigation of Plasma Activated Lactate Solutions, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pE13O (ORAL
)
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori. Atomic layer etching of metal compounds with selective removal of their carbides over nitrides using a floating wire-assisted liquid vapor plasma method, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09aC03O (ORAL
)
Taito Yoshie, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, and Masaru Hori. Feature profiles in cyclic etch using C4F8 and SF6 gas-modulated plasma, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pC06O (ORAL
)
Liugang Hu, Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Hiroki Kondo, Makoto Sekine, and Masaru Hori. Etching of a layer from stacked graphene in remote oxygen plasma, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09P-02 (POSTER
)
Jumpei Kurokawa, Tadashi Mitsunari, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Kenji Ishikawa, and Masaru Hori. Correlation analysis between radicals in gas phase and etch resistance of hydrogenated amorphous carbon film, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plonlineasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pB14O (ORAL
)
Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori. Manipulation of Etch Selectivity of Silicon Nitride over Silicon Dioxide by Controlling Substrate Temperature with a CF4/H2 Plasma, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 2022.03.06-10 (ORAL
)
Hiroshi Hashizume, Hidemi Kitano, Hiroko Mizuno, Akiko Abe, Kaoru Sanda, Genki Yuasa, Satoe Tohno, Hiromasa Tanaka, Kenji Ishikawa, Shogo Matsumoto, Hitoshi Sakakibara, Susumu Nikawa, Masayoshi Maeshima, Masaaki Mizuno, and Masaru Hori. Quality-Increasing Effect of Plasma Treatment in a Paddy on Various Rice Cultivars, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pE07O (ORAL
)
Dennis Christy, Ngo Van Nong, Osamu Oda, Masaru Hori and Nikolay Britun. Spectroscopy of H2/CH4/N2 Plasma for Carbon Nanowalls Growth, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pE06O (ORAL
)
Ma. Shanlene D.C. Dela Vega, Hiroki Kondo, Takayoshi Tsutsumi, Thi-Thuy-Nga Nguyen, Kenji Ishikawa, Makoto Sekine, Magdaleno R. Vasquez Jr., and Masaru Hori. In-liquid plasma coating of graphite films on metal surface immersed in ethanol, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pB09O (ORAL
)
Hiroki Kondo, Atsushi Ozaki, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Uroš Cvelbar and Mineo Hiramatsu. Three-dimensional morphological analysis of carbon nanowalls, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pE03O (ORAL
)
Frank Wilson Amalraj, Dhasiyan Arun Kumar, Naohiro Shimizu, Osamu Oda, Kenji Ishikawa, and Masaru Hori. Homoepitaxial Growth of GaN Using a p-BN Tube Attached Radical Enhanced MOCVD (REMOCVD), 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08pC13O (ORAL
)
Swapnil Ghodke, Motoyuki Murashima, Dennis Christy, Ngo Van Nong, Osamu Oda, Noritsugu Umehara, Kenji Ishikawa, Masaru Hori. Nanomechanical Properties Of Maze-Like Carbon Nanowalls Structure By Nanoindentation Technique, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pD06O (ORAL
)
Daichi Goto, Naoyuki Iwata, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Masafumi Ito and Masaru Hori. Improvement of Efficiency of Biodegradation of Polyethylene Terephthalate using Neutral-Oxygen-Radical Source, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-29 (POSTER
)
Takumi Hashimoto, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori. Effect of substrate temperature on morphology of carbon nanowalls grown by a radical-injection plasma-enhanced chemical vapor deposition using C2F6 /H2 mixture gas, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-05 (POSTER
)
Takumi Yamauchi, Naoyuki Iwata, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Shinichi Akiyama, and Masaru Hori. Measurement of RONS concentration in plasma-irradiated artificial seawater, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09P-26 (POSTER
)
Yang Liu, Yoshimichi Nakatsu, Hiromasa Tanaka, Kazunori Koga, Kenji Ishikawa, Masaharu Shiratani, and Masaru Hori. Genotoxic effects of plasma activated Ringer’s lactate solution on cancer cells, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pE08O (ORAL
)
Shintaro Iba, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori. Effect of RF Stage-Bias on Morphology of Carbon Nanowalls Grown by a Radical-Injection PlasmaEnhanced Chemical Vapor Deposition, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pD05O (ORAL
)
Naohiro Shimizu, Ranjit Borude, Reiko Tanaka, Kenji Ishikawa, Osamu Oda, Hiroki Hosoe, Satoshi Ino, Yousuke Inoue and Masaru Hori. Rebound Tailing Pulse Method Applied to Water Electrolysis, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 07pB11O (ORAL
)
Shunya Hashimoto, Yuta Matsumoto, Jun-Seok Oh, Tatsuru Shirafuji, Kenji Ishikawa and Masaru Hori. Visualization of Plasma Affected Area on a 3D Printed Mouse Mode, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08pE09O (ORAL
)
Shohei Nakamura, Atsushi Tanide, Takahiro Kimura, Soichi Nadahara, Kenji Ishikawa, Osamu Oda and Masaru Hori. Low Damage Atomic Layer Etching of GaN at High Temperature, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09aC04O (ORAL
)
Daiki Ito, Naoyuki Iwata, Kenji Ishikawa, Hiroshi Hashizume, Kae Nakamura, Camelia Miron, Hiromasa Tanaka, Hiroaki kajiyama, Shinya Toyokuni, Masaaki Mizuno and Masaru Hori. Evaluation of Selective AntiCancer Effect in PlasmaActivated Ringer's Lactate Solution Produced by Regulated Surrounding Atmosphere, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09aE06O (ORAL
)
Hayate Tanaka, Takamasa Okumura, Pankaj Attri, Teruki Anan, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani, Yushi Ishibashi, Masataka Nakao Kentaro Namiki, Shoko Tsuboyama, Kenji Hashimoto, Kazuyuki Kuchitsu, Hiroshi Hashizume, Kenji Ishikawa, Masaru Hori, and Kazunori Koga. Effects of Concentration of Plasma Activated Lactate on Germination of Arabidopsis thaliana Seeds, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09pE09O (ORAL
)
Masaru Hori, Hiromasa Tanaka and Kenji Ishikawa. Tuning Plasma-Knobs to Control Seamless Radical-Induced Biological Reaction Processes, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-24 (POSTER
)
Hidefumi Uchiyama, Kenji Ishikawa, Masaru Hori and Takashi Kondo. Low Temperature Plasma Chemistry of Volatile and Non-Volatile Solutes in Aqueous Solutions: e.p.r. and Spin Trapping Studies, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-25 (POSTER
)
Koki Ono, Takashi Koide, Kenji Ishikawa, Hiromasa Tanaka, Hiroki Kondo, Ayae SugawaraNarutaki, Yong Jin, Shigeo Yasuhara, Masaru Hori and Wakana Takeuchi. Biocompatibility of Conformal Coating of SiC on Carbon Nanowall Scaffold, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-28 (POSTER
)
Shota Araki, Tomomiti Ota, Hironaka Tsukagoshi, Naoyuki Iwata, Masaru Hori and Masafumi Ito. Growth-Promotion Effect of Oxygen-Radical-Treated Tryptophan Solutions on Arabidopsis Thaliana, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-31 (POSTER
)
Yoshihiro Sakamoto, Takayoshi Tsutsumi and Masaru Hori. Effect of Air Introduction between Electrodes on Rapid Removal Process of Polymer Contamination on Floor by Atmospheric Pressure Plasma, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-44 (POSTER
)
Hiroyuki Kato, Kiyota Sakai, Shou Ito, Naoyuki Iwata, Masafumi Ito, Masaru Hori, Motoyuki Shimizu and Masashi Kato. Enhanced Bioremediation of 4-Chlorophenol by Oxygen Radical Treatment Based on Non-Thermal Atmospheric Pressure Plasma, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 08P-63 (POSTER
)
Kenichi Inoue, Noritaka Sakakibara, Taku Goto, Tsuyohito Ito, Yoshiki Shimizu, Kenji Ishikawa, Masaru Hori and KazuoTerashima. Carbon Layer Formation on Boron Nitride via a Plasma in Hydroquinone Solution, 14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）, online, 2022.03.06-10. 09P-25 (POSTER
)
Kenji Ishikawa,Taito Yoshie,Takayoshi Tsutsumi,Hiroki Kondo,Makoto Sekine,Masaru Hori. Transient Behaviors of Gaseous and Surface Reactions in a Cycle of Pasivation and Etch Steps Using Ar-Based C4F8 and SF6 Plasma, MRS Spring Meetings & Exhibits, Honolulu. Hawai, 2022/5/9. MF01.03.02 (ORAL
)
Hiroki Kondo,Kiyoshi Kuwahara,Arun Dhasiyan,Osamu Oda,Koji Yamakawa,Shoji Den,Yoshihiro Nakai,Masaru Hori. Growth of High-In Content InGaN Layer by Molecular Beam Epitaxy Under High-Density Nitrogen Radical Irradiation, MRS Spring Meetings & Exhibits, Honolulu. Hawai, 2022/5/10. MF01.05.03 (ORAL
)
Masaru Hori. Creation of Plasma Biology by Seamless Radical Control in Gas Phase, Liquid Phase and Biological Systems, MRS Spring Meetings & Exhibits, Honolulu. Hawai, 2022/5/11. MF01.08.01 (ORAL
)
Kuangda Sun, Chieh-Ju Liao, Shih-Nan Hsiao, Makoto Sekine, Toshiyuki Sasaki, Chihiro Abe, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori. "Study of etching process using CHF3 gas condensed layer in cryogenic region", 1st International Workshop on Plasma Cryo Etching Processes（PlaCEP2022）, Orléans, France, 2022/5/17. Talk3 (ORAL
)
Camelia Miron, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Hiroaki Kajiyama, Shinya Toyokuni, Massaki Mizuno, Masaru Hori. "Physicochemical Investigation of Plasma Activated Liquids Organically Engineered by Cold Atmospheric Pressure Plasma for Cancer Treatment, 9th International Conference on Plasma Medicine (ICPM9), Utrecht, The Netherlands, 2022/6/30. O4 D4B3, pp.117 (ORAL
)
Hiroshi Hashizume, Hidemi Kitano, Hiroko Mizuno, Akiko Abe, Kaoru Sanda, Genki Yuasa, Satoe Tohno, Hiromasa Tanaka, Kenji Ishikawa, Shogo Matsumoto, Hitoshi Sakakibara, Susumu Nikawa, Masayoshi Maeshima, Masaaki Mizuno, Masaru Hori. Effectiveness of Plasma Treatment for Various Rice Cultivation, 9th International Conference on Plasma Medicine (ICPM9), Utrecht, The Netherlands, 2022/6/27. P1.8, pp133 (POSTER
)
Kae Nakamura, Kazuya Sugiyama, Nobuhisa Yoshikawa, Masato Yoshihara,Tetsuya Matsukawa, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori and Hiroaki Kajiyama. "Immunostimulatory Effect of Plasma-Activated Solutions in the Intraperitoneal Environment of Ovarian Cancer", 9th International Conference on Plasma Medicine (ICPM9), Utrecht, The Netherlands, 2022/6/28. P2.23, pp. 179 (POSTER
)
Kazunori Shinoda, H. Hamamura,K. Maeda, M. Izawa, T. Nguyen, K. Ishikawa, M. Hori. "Plasma-Assisted Thermal-Cyclic Etching of Silicon Germanium Selective to Germanium", AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022), Atomic Layer Etching 2022 Workshop (ALE 2022), (ALD/ALE2022), Ghent, Belgium, 2022/6/27. ALE-MoM2-3, pp.7 (ORAL
)
A. Osonio, Takayoshi Tsutsumi, Nagoya B. Mukherjee, R. Borude, N. Kobayashi, M. Hori. "Area-Selective Atomic Layer Etching of SiO2 Using Silane Coupling Agent", AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022), Atomic Layer Etching 2022 Workshop (ALE 2022), (ALD/ALE2022), Ghent, Belgium, 202206/27. ALE2-MoA-14, pp. 9 (ORAL
)
Thi-Thuy-Nga Nguyen, K. Shinoda, H. Hamamura, K. Maeda, K. Yokogawa, M. Izawa, K. Ishikawa, M. Hori. "Surface Modification for Atomic Layer Etching of TiAlC Using Floating Wire-Assisted Liquid Vapor Plasma at Medium Pressure", AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022), Atomic Layer Etching 2022 Workshop (ALE 2022), (ALD/ALE2022), Ghent, Belgium, 2022/6/28. ALE-TuM2-3, pp.17 (ORAL
)
Ma. shanlene Dela Cruz DELA VEGA, Ayane KITAHARA, Thi-thuy-nga NGUYEN, Takayoshi TSUTSUMI, Atsushi TAKANO, Yushu MATSUSHITA, Masaru HORI. Nanostructure Control and Modification of Poly(styrene-b-2-vinylpyridine) Block Copolymer in H2/N2 Plasma Process, The 5th International Union of Materials Research Societies International Conference of Young Researchers on Advanced Materials(IUMRS-ICYRAM2022)", Fukuoka, Japan, 2022/8/4. I-O4-009 (ORAL
)
K. Kodama, M. Kobayashi*, M. Miyachi*, O. Oda, M. Hori, and D. Ueda. "Self-aligned Ohmic Contact Formation with Selectively Grown n+-GaN Layer by Using Picosecond Laser Deposition, "14th Topical Workshop on Heterostructure Microelectronics(TWHM 2022), hiroshima japan, 2022/9/1. No 9-6 (POSTER
)
Shih-Nan HsiaoNicolay BritunThi-Thuy-Naga NguyenTakayoshi TsutsumiKenji IshikawaMakoto SekineMasaru Hori. In situ monitoring hydrogen fluoride molecular density and its effects on etch selectivity of SiN over SiO2 films with hydrogen-contained fluorocarbon down-flow plasmas, THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-22, Sapporo Japan, 2022/9/13. Tue-H1-4 (ORAL
)
Hiroki KondoJumpei KurokawaKenji IshikawaTakayoshi TsutsumiMakoto SekineMasaru Hori. Machine learning and contribution analysis of radicals to the properties of hydrogenated amorphous carbon films grown by a plasma-enhanced chemical vapor deposition, THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-23, Sapporo Japan, 2022/9/13. Tue-H1-5 (ORAL
)
Nikolay Britun, Peterraj Dennis Christy, Vladislav Gamaleev, Shih-Nan Hsiao, Masaru Hori. Properties of an atmospheric He-based nanosecond jet discharge, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 2022/10/6. ER5.00007 (ORAL
)
Airah Osonio, Takayoshi Tsutsumi, Bablu Mukherjee, Ranjit Borude, Nobuyoshi Kobayashi, and Masaru Hori. Topographically-selective atomic layer etching of SiO2 using fluorine-containing plasma, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 2022/10/5. FW5:3 (ORAL
)
Hiroshi Hashizume, Hidemi Kitano, Hiroko Mizuno, Akiko Abe, Kaoru Sanda, Genki Yuasa, Satoe Tohno, Shih-Nan Hsiao, Hiromasa Tanaka, Kenji Ishikawa, Shogo Matsumoto, Hitoshi Sakakibara, Yoji Hirosue, Masayoshi Maeshima, Masaaki Mizuno, Masaru Hori. Various approaches of cold plasma treatment to brewer’s rice plant for improvement of grain quality, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, . EF3.00003 (ORAL
)
Kenji Ishikawa, Takashi Kondo, Hiromasa Tanaka, Masaru Hori, Shinya Toyokuni, Masaaki Mizuno. Biological effects of the combination with low temperature plasmas and nanoparticles-platinum and gold-Plasma Medical & Agricultural Application II, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221007. EF2.00006 (ORAL
)
Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori. Achieving selective etching of SiN and SiO2 over amorphous carbon during CF4/H2 by controlling substrate temperature, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221006. ER2.00007 (ORAL
)
Makoto Sekine, Bibhuti B Sahu, Shogo Hattori, Takayoshi Tsutsumi, Nikolay Britun, Kenji Ishikawa, Hirohiko Tanaka, Taku Gohira, Noriyasu Ohno, Masaru Hori. Langmuir probe and Laser Photodetachment Study of Afterglow Phase in Dual RF Frequency Pulsed Plasma Etching Processes Operated with Synchronized DC Bias, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221007. IF3.00006 (ORAL
)
Nikolay Britun, Peterraj Dennis Christy, Vladislav Gamaleev, Shih-Nan Hsiao, Masaru Hori. Optical diagnostics of a nanosecond atmospheric He plasma jet, 18th International Conference on Plasma Surface Engineering(PSE2022), Erfurt, Germany, 20220913. OR0604 (ORAL
)
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori. Selective dry etching of TiAlC over TiN using N2/H2 plasma chemistry, AVS 68th International Symposium & Exhibition, Pittsburgh, USA, 20221109. PS2+TF-WeM-11 (ORAL
)
Kenji Ishikawa, T. Nguyen, K. Shinoda, H. Hamamura, K. Maeda, K. Yokogawa, M. Izawa, M. Hori. Impact of Bias Power and Oxygen Addition on Selective Dry Etching of TiAlC over TiN Using N2/H2-based Plasmas, AVS 69th International Symposium & Exhibition, Pittsburgh, USA, 20221109. PS2+TF-WeM-5 (ORAL
)
Shinji Yoshimura, Yoko Otsubo, Akira Yamashita, Katsuki Johzuka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori. Development of an experimental system for cell viability assays of yeasts using gas-temperature controllable plasma jets, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221004. HT4.00084 (ORAL
)
Yasumasa Mori, Naoyuki Iwata, Tomiyasu Murata, Masaru Hori, Masafumi Ito. Dependence of depth in liquid and gas-flow-rate ratio irradiated with nitric-oxide radicals on proliferation of fibroblast cells, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221004. HT4.00091 (ORAL
)
Shohei Nakamura, Atsushi Tanide, Masafumi Kawagoe, Soichi Nadahara, Kenji Ishikawa, Osamu Oda, Masaru Hori. Damage mitigation in atomic layer etching of GaN by cyclic exposure of BCl3 gas and F2 added Ar plasma at high substrate temperature, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. FW5.00002 (ORAL
)
Taiga Nishida, Naoyuki Iwata, Tomiyasu Murata, Hiromasa Tanaka, Masaru Hori, Masafumi Ito. Inactivation of Breast Cancer Cells using Nitrogen-Oxygen-Radical-Activated Lactate Ringer's Solution, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. HW6.00084 (POSTER
)
Ryuichi Ohashi, Naoyuki Iwata, Hiroyuki Kato, Motoyuki Shimizu, Masashi Kato, Masaru Hori, Masafumi Ito. Degradation of lignin model compounds using ambient-air glow discharge, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. HW6.00086 (POSTER
)
Viscous reduction of carboxymethyl cellulose treated with ambient-air glow discharge using peristaltic pumps. Viscous reduction of carboxymethyl cellulose treated with ambient-air glow discharge using peristaltic pumps, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. HW6.00088 (POSTER
)
Araki Shota, Tomomichi Ota, Hironaka Tsukagoshi, Naoyuki Iwata, Masaru Hori, Masafumi Ito. Growth promotion of Arabidopsis thaliana using oxygen-radical-treated L-tryptophan solution, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. HW6.00090 (POSTER
)
Hiromi Alwi Yamamoto, Masaru Hori, Masafumi Ito. Spatiotemporal distribution measurements of ozone in the gas and liquid phases generated by non-equilibrium atmospheric pressure radical source, 11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022), Sendai, Japan, 20221005. HW6.00094 (POSTER
)
A.Osonio, T.Tsutsumi, B.Mukherjee, R.Borude, N.Kobayashi, M.Hori. Isotropic Plasma-enhanced Atomic Layer Etching of SiO2 using F radicals and Ar plasma, The 43rd International Symposium on Dry Process (DPS2022), Osaka, Japan, 20221125. P-54 (POSTER
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N.Britun, S.N.Hsiao,M.Sekine, M.Hori. Plasma diagnostics of the F and O radical density in dual-frequency capacitively coupled discharges with CF4/H2, The 43rd International Symposium on Dry Process (DPS2022), Osaka, Japan, 20221125. P-12 (POSTER
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