M. Hori (INVITED
) Synthesis of Carbon Nanowall with Radical Controlled Plasma Processes International Advanced Plasma Processing Seminar, Sungkyunkwan University, Suwon, Korea, January 6, 2005
M. Hori, M. Hiramatsu (INVITED
) Synthesis of Self-Assembled Carbon Nanowalls using Plasma Enhanced Chemical Vapor Deposition with Radical Fifth International Symposium on Biomimetic Materials Processing (BMMP-5), Nagoya University, Japan, January 26-28, 2005
M. Hori (PLENARY
) In-Situ Monitoring of Density and Temperature of Species in Smart Nano-Plasma Processing Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005
H. Kano, N. Yoshida, and M. Hori (INVITED
) Development of New Compact Non-Equilibrium Atmospheric Pressure Plasmas and Their Applications for the Surface Modification Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005
M. Hiramatsu, and M. Hori (INVITED
) Carbon Nano-Structure Formation with Radical Controlled Plasma Processing Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005
M. Hori (INVITED
) Dry Etching of Low-k Dielectrics The ECS ULSI Process Integration IV Symposium, Quebec City Convention Center, Quebec, Canada, May 15-20, 2005
M. Hiramatsu, and M. Hori (INVITED
) Synthesis of Carbon Nano-Structures Using Novel Plasma Processing Italy-Japan International Seminar on Advanced Plasma Processing, Nagoya University, Nagoya, Japan, June 27, 2005
M. Hori (INVITED
) Progress of Radical Measurements in Plasmas for Semiconductor Processing 27th International Conference on Phenomena in Ionized Gases, NH Koningshof, Veldhoven, the Netherlands, July 18-22, 2005
M. Hori (INVITED
) Radical-Controlled Plasma Nano Processes, 5th Asian-European International Conference on Plasma Surface Engineering, Shangri-La Hotel, Qingdao, China, September 12-16, 2005. p. 3
M. Hiramatsu, and M. Hori (INVITED
) Fabrication of Carbon Nanostructures Using Plasma CVD Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005
M. Hori, and M. Hiramatsu (INVITED
) Fabrication of Carbon Nanowalls Using Novel Plasma Processing Advantages International Conference on Advanced Materials and Devices 2005 (ICAMD 2005), Ramada Plaza Jeju Hotel, Jeju, Korea, December 5-7, 2005
堀 勝 (INVITED
) 超高精度微細加工のためのプロセスプラズマの課題と展望 International Packaging Strategy Symposium (IPSS) 2005/SEMIテクノロジーシンポジウム(STS) 2005, Makuhari, Chiba, Japan, December 7-9, 2005
M. Hori (INVITED
) Smart Plasma Nano-Processing with Advanced Diagnostics 2nd International Workshop on Advanced Plasma Processing and Diagnostics, Nagoya University, Nagoya, Japan, December 12-13, 2005
General
M. Ebihara, S. Takashima, M. Hori, S. Den, and H. Kano. Novel Nitrogen Radical Cleaning Technique for UHV Chamber Wall, 2005 Spring Meeting of Materials Research Society (MRS), Moscone West, San Francisco Marriott, San Francisco, USA, March 28-April 1, 2005. P5.11 (
)
K. Takeda, and M. Hori. Measurement of Absolute Density of O Atoms in Surface Wave Plasma Employing Vacuum Ultraviolet Laser System Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
S. Uchida, and M. Hori. Basic Study of Etching Surface Reaction with an Ion Beam with Radical Injection Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
M. Iwasaki, and M. Hori. Diagnostics of Species in Non-Equilibrium Atmospheric Pressure Plasma with Dielectric Discharge Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
S. Takashima, and M. Hori. Simultaneous Monitoring of H, N, and O Atom Densities in the Reactive Plasma Employing Vacuum ultraviolet Absorption Spectroscopy Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
K. Yamakawa, S. Den, and M. Hori. Ultrahigh Speed Processing Employing a Microwave Excited Non-Equilibrium Atmospheric Pressure Plasma Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
K. Takeda, M. Hori, and M. Ito. Micro-Fabrication of Lens on the Top of Optical Fiber Employing Electron Beam Excited Plasma Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
S. Den, S. Takahashi, K. Yamakawa, and M. Hori. Environmental Benign Etching System Employing a New Gas Source Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
H. Kano, M. Ebihara, and M. Hori. Radical Cleaning Technology for Chamber and its Radical Surface Reaction Korea-Japan Workshop on Advanced Plasma Processing and Diagnostics, Commodore Hotel, Busan Korea, April 22-23, 2005. (
)
H. Nagao, M. Taniguchi, M. Hiramatsu, H. Amano, and M. Hori. Fabrication of Aligned Carbon Nanotube Film with Self-Assembled Tip Arrays Using Microwave Plasma-Enhanced Chemical Vapor Deposition 10th International Conference on New Diamond Science and Technology, AIST Auditorium, Tsukuba, Japan, May 11-14, 2005. (
)
S. Takahashi, S. Den, T. Katagiri, K. Yamakawa, H. Kano, and M. Hori. Development of the Compact C2F4 Gas Supply Equipment and its Application to Dielectric Etching Processes, 15th International Colloquium on Plasma Processes, Les Ecouges, Autrans, France, June 6-9, 2005. p. 6 (
)
M. Hori, and M. Hiramatsu. Fabrication of Carbon Nanowalls Using Plasma-Enhanced Chemical Vapor Deposition, 15th International Colloquium on Plasma Processes, Les Ecouges, Autrans, France, June 6-9, 2005. p. 19 (
)
K. Takeda, Y. Kubota, Y. Matsumi, and M. Hori. Behaviors of Absolute Oxygen Atom Density in Surface Wave Plasma with Vacuum Ultraviolet Laser Absorption Spectroscopy 27th International Conference on Phenomena in Ionized Gases, NH Koningshof, Veldhoven, the Netherlands, July 18-22, 2005. (
)
M. Iwasaki, M. Ito, T. Uehara, and M. Hori. High Speed SiO2 Etching and Measurements of Gas Phase Using Atmospheric Pressure-Pulsed CF4/Ar Plasma 27th International Conference on Phenomena in Ionized Gases, NH Koningshof, Veldhoven, the Netherlands, July 18-22, 2005. (
)
M. Nagai, M. Hori, and T. Goto. Behaviors of Fluorocarbon Radicals in 60 MHz Capacitively Coupled Plasma 17th International Symposium on Plasma Chemistry, Sheraton Centre, Toronto, Canada, August 7-12, 2005. (
)
M. Hori, and M. Hiramatsu. Fabrication of Self-Assembled Carbon Nanowalls Using Plasma Enhanced Chemical Vapor Deposition with Hydrogen Radical Injection 17th International Symposium on Plasma Chemistry, Sheraton Centre, Toronto, Canada, August 7-12, 2005. (
)
M. Hiramatsu, and M. Hori. High-Rate Growth of Dense, Aligned Carbon Nanotube Film Using Microwave Plasma Enhanced Chemical Vapor Deposition 17th International Symposium on Plasma Chemistry, Sheraton Centre, Toronto, Canada, August 7-12, 2005. (
)
M. Hori, S. Takahashi, S. Takashima, M. Hiramatsu, H. Kano, and S. Den. Development of Nano-Process Control Technology Using Smart Sensors and Application to Automic Nano Production Equipment, International Symposium on EcoTopia Science 2005 (ISETS05), Nagoya University, Nagoya, Japan, August 8-9, 2005. pp. 451-452 (
)
M. Takahata, M. Hori, and T. Chikyo. Room Temperature Synthesis of Silicon Nanoparticles Using Pulse-Modulated UHF SiH4/H2 Plasma, International Symposium on EcoTopia Science 2005 (ISETS05), Nagoya University, Nagoya, Japan, August 8-9, 2005. pp. 455-456 (
)
M. Nakamura, M. Hiramatsu, H. Amano, H. Kano, T. Machino, S. Takashima, and M. Hori. Preparation Pt Particles on Carbon Nanowalls in Supercritical Carbon Dioxide, International Symposium on EcoTopia Science 2005 (ISETS05), Nagoya University, Nagoya, Japan, August 8-9, 2005. pp. 469-470 (
)
M. Ebihara, S. Takashima, M. Hori, S. Den, H. Kano, T Maeda, and M. Hiramatsu. The Growth Mechanism of Nanowalls Growth in Tandem Type H Radical Injection Plasma Enhanced Chemical Vapor Deposition, International Symposium on EcoTopia Science 2005 (ISETS05), Nagoya University, Nagoya, Japan, August 8-9, 2005. pp. 473-474 (
)
S. Takahashi, S. Den, T. Katagiri, K. Yamakawa, H. Kano, and M. Hori. Development of Green Gas Supply System for Zero-Emission Plasma Nano-Processing, International Symposium on EcoTopia Science 2005 (ISETS05), Nagoya University, Nagoya, Japan, August 8-9, 2005. pp. 325-328 (
)
M. Hiramatsu, and M. Hori. High-Rate Growth of Aligned Double-Walled Carbon Nanotube Using Microwave Plasma Enhanced Chemical Vapor Deposition Film International Conference on Surfaces, Coatings and Nanostructured Materials, Aveiro, Portugal, September 7-9, 2005. (
)
M. Hiramatsu, and M. Hori. Carbon Nanowalls Grown Using Plasma-Enhanced Chemical Vapor Deposition International Conference on Surfaces, Coatings and Nanostructured Materials, Aveiro, Portugal, September 7-9, 2005. (
)
H. Nagao, M. Hiramatsu, H. Amano, and M. Hori. Fabrication of Aligned Carbon Nanotube Film with Self-Assembled Tip Array 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Toulouse, France, September 12-16, 2005. (
)
A. Enomoto, M. Nakamura, M. Hiramatsu, Y. Ando, and M. Hori. Control of Surface Morphology in Carbon Nanowall Growth Using Rf Plasma-Enhanced Chemical Vapor Deposition 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Toulouse, France, September 12-16, 2005. (
)
M. Kimura, K. Yamakawa, Y. Ando, M. Hiramatsu, and M. Hori. Fabrication of Carbon Nanotubes Using Microwave-Excited Atmospheric Pressure Plasma CVD 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Toulouse, France, September 12-16, 2005. (
)
S. Uchida, and M. Hori. Decomposition and Polymerization of Perfluorinated Compounds in Microwave-Excited Atmospheric Pressure Plasma Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005. (
)
M. Nagai, and M. Hori. Investigation of Surface Reactions during Organic Low Dielectric Film Dry Etching Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005. (
)
K. Takeda, Y. Kubota, S. Takashima, A. Serdyuchenko, Y. Matsumi, and M. Hori. Behaviors of O Atom and Other Species in Kr and O2 Mixture Plasma Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005. (
)
M. Takahata, Y. Ito, M. Hori, and T. Chikyo. Room Temperature Formation of Silicon Nanoparticles Using Pulse-Modulated UHF SiH4/H2 Plasma Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005. (
)
M. Iwasaki, M. Ito, T. Uehara, and M. Hori. High Speed SiO2 Etching and Measurements of Gas Exhausted Using Non-Equilibrium Atmospheric Pressure-pulsed Plasma Deutshlandjahr in Japan Academic Symposium (Plasma Science and Technology Symposium), Nagoya University, Nagoya, Japan, September 19-20, 2005. (
)
H. Ito, S. Takashima, H. Kano, M., and Hori. Development of a Compact Arc Discharge Light Source for Measurement of Radicals 58th Annual Gaseous Electronics Conference (GEC), Double Tree Hotel, San Jose, USA, October16-20, 2005. (
)
K. Takeda, T. Ohta, M. Ito, and M. Hori. Investigation of Pulse-Modulation Effect in Electron Beam Excited Plasma with Time Resolved Optical Emission Spectroscopy 58th Annual Gaseous Electronics Conference (GEC), Double Tree Hotel, San Jose, USA, October16-20, 2005. (
)
K. Takeda, Y. Kubota, A. Serdyuchenko, S. Takashima, and M. Hori. Diagnostics of Oxygen Atoms in Surface Wave Plasma with Vacuum Ultraviolet Laser Absorption Spectroscopy 58th Annual Gaseous Electronics Conference (GEC), Double Tree Hotel, San Jose, USA, October16-20, 2005. (
)
M. Nagai, and M. Hori. Behaviors of Fluorocarbon Radical Temperature in Ar/N2/C4F8 Low-k Etching Plasma 52nd International Symposium American Vacuum Society (AVS), Hynes Convention Center, Boston, USA, October 30-November 4, 2005. (
)
S. Uchida, M. Hori, K. Oshima, A. Ando, K. Nagahata, and T. Tatsumi. Control of Surface Reactions during Organic Low-k Dry Etching 52nd International Symposium American Vacuum Society (AVS), Hynes Convention Center, Boston, USA, October 30-November 4, 2005. (
)
N. Yoshida, H. Kano, S. Den, and M. Hori. Ultra Fast Surface Modification Processes Employing Compact Non-Equilibrium Atmospheric Pressure Plasmas 52nd International Symposium American Vacuum Society (AVS), Hynes Convention Center, Boston, USA, October 30-November 4, 2005. (
)
M. Hori, K. Takeda, Y. Kubota, M. Sugiura, Y. Matsumi, S. Tahara, and K. Kubota. Control of Radical and Ion Densities and Its Application to Damage-Free Resist Stripping over SiOCH in Oxygen-Based Surface Wave Plasmas , 27th International Symposium on Dry Process (DPS2005), Ramada Plaza Jeju Hotel, Jeju, Korea, November 28-30, 2005. pp. 29-30 (
)
S. Takashima, S. Uchida, K. Ohshima, K. Nagahata, T. Tatsumi, and M. Hori. Plasma Damages on Low-k Films in Etching and Photoresist Ashing, 27th International Symposium on Dry Process (DPS2005), Ramada Plaza Jeju Hotel, Jeju, Korea, November 28-30, 2005. pp. 29-30 (
)
M. Iwasaki, M. Ito, T. Uehara, and M. Hori. Diagnostics of CF2 Radical and Molecules in Non-Equilibrium Atmospheric Pressure-Pulsed Plasma for SiO2 Etching, 27th International Symposium on Dry Process (DPS2005), Ramada Plaza Jeju Hotel, Jeju, Korea, November 28-30, 2005. pp. 29-30 (
)
H. Nagao, M. Hiramatsu, H. Amano, and M. Hori. Rapid Growth of Dense, Aligned Single-Walled Carbon Nanotubes for Multi-Level Interconnections of Ultra-Large Scale Next-Generation Integrated Circuits, 27th International Symposium on Dry Process (DPS2005), Ramada Plaza Jeju Hotel, Jeju, Korea, November 28-30, 2005. pp. 29-30 (
)
M. Hori, K. Yamakawa, S. Den, H. Kano, T. Maeda, and M. Hiramatsu. High Accurate Growth Process of Carbon Nanowalls Using Hydrogen Radical Injection Plasma CVD, International Symposium on Frontier of Nano-Materials Based on Advanced Plasma Technologies, Nihon University, Tokyo, Japan, December 9, 2005. HS-015 (
)
M. Ura, W. Nakamura, Y. Tokuda, , M. Hiramatsu, H. Kano, and M. Hori. The Electric Characteristics of Carbon Nanowalls, International COE Workshop on Nano Processes and Devices, and Their Applications, Nagoya University, Nagoya, Japan, December 15-16, 2005. pp. 51-54 (
)