T. Ohta, M. Ito, T. Tsutsumi,T. Hiraoka, K. Takeda, M. Hori (INVITED
) Monitoring of wafer temperature in plasma processing using optical low-coherence interferometry, 20th Workshop on Advanced Plasma Processes and Diagnostics and The 7th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Okazaki Conference Center, Okazaki, Japan, January 26, 2013.
K. Ishikawa, Y. Miyawaki, T. Takeuchi, K. Takeda, S. Tajima, H. Kondo, T. Hayashi, M. Sekine, M. Hori (INVITED
) Plasma-surface intertactions in plasma etching of future device fabrication, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013.
I. Sakai , N. Sakurai, T. Ohiwa, M. Sekine, M. Hori (INVITED
) High rate deep Si etching for TSV applications, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013.
M. Hori (INVITED
) Knowledge Cluster Lecture, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya, Japan, January 28-1, 2013.
T. Ohta, M. Ito, M. Hori (INVITED
) Development of optical diagnostics method for interaction between plasma and surface using femtosecond laser technique, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
H. Kondo, M. Hiramatsu, M. Sekine, M. Hori (INVITED
) Chemical modification and nano-bio applications of carbon nanowalls, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
M. Hori, J. G. Han, and H. Toyoda (INVITED
) Global collaboration for advanced plasma R&D of PLANT, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
Y. MiyawakiY. Kondo, K. Takeda, S. Tajima, H. Kondo, K. Ishikawa, T. Hayashi, M. Sekine, A. Ito, H. Matsumoto, M. Hori (INVITED
) Reduction of surface roughness on ArF-photoresist by C5HF7 gas plasma, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
H. Hashizume, T. Ohta, F. Jia, K. Takeda, K. Ishikawa, M. Hori, M. Ito (INVITED
) Analysis of fungal spore inactivation based on measurements of reactive-oxygen-species densities, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
Y. Setsuhara, A. Miyazaki, K. Takenaka, H. Abe, M. Hori (INVITED
) Plasma Interactions with Soft Materials in Air and Liquid, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Hori (INVITED
) Si chemical dry etching using the reaction of NO and F2, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
M. Ito, T. Ohta, T. Tsutsumi, K. Takeda, M. Hori (INVITED
) Precise Rapid Measurement of Substrate Temperature by Frequency-Domain Optical Low-Coherence Interferometry, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013.
Kenji Ishikawa, H. Tanaka, H. Hashizume, T. Ohta, M. Ito, K. Takeda, H. Kondo, M. Sekine, M. Hori (INVITED
) In-situ ESR measurements for Plasma Materials Interractions, 9th Asian-European International Conference On Plasma Surface Enginnering (AEPSE), Ramada Plaza Jeju Hotel, Jeju, Korea, August 25-30, 2013. 23-1
Masaru Hori (PLENARY
) Plasma Medical Innovation : Addressing to a New Science and Technology, 9th Asian-European International Conference On Plasma Surface Enginnering (AEPSE), Ramada Plaza Jeju Hotel, Jeju, Korea, August 25-30, 2013. P-2
M. Hori (INVITED
) Collaboration program of PLANT for IPNM, The Workshop of the Joint Institute for Plasma Nano Materials (IPNM), VBL Hall in Nagoya University, Japan , October 23, 2013.
M. Hori (KEYNOTE
) Advanced Thin Film Coating Based on Plasma Material Science, International Thin Films Conferance 2013, Taiwan Association for Coatings and Thin Films Technology, The Grand Hotel, Taipei, Taiwan, October 5-9, 2013.
Masaru Hori, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine (INVITED
) Advanced Surface Engineering on Material Processing Employing Ultrahigh Density Atmospheric Pressure Plasma, 1st International Conference on Surface Engineering (ICSE2013), Busan, Korea, November 18-21, 2013. WEDPM06-5
M. Ito, T. Tsutsumi, T. Ohta, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori (INVITED
) Advanced Surface Engineering on Material Processing Employing Ultrahigh Density Atmospheric Pressure Plasma, 1st International Conference on Surface Engineering (ICSE2013), Busan, Korea, November 18-21, 2013. THUAM03-2
M. Hiramatsu, H. Kondo, M. Hori (INVITED
) Carbon nanowalls: synthesis and application, 1st International Conference on Surface Engineering (ICSE2013), Busan, Korea, November 18-21, 2013. WEDPM05-1
H. Kondo, M. Hori, M. Hiramatsu (INVITED
) Controlled synthesis and nano-bio applications of carbon nanowalls based on advanced plasma technology, International conference on processing and manufacturing of advanced materials (THERMEC 2013), Rio Hotel, Las Vegas, USA, December 2-6, 2013.
M. Hiramatsu, H. Kondo, M. Hori (INVITED
) Synthesis of graphene nanowalls for clean energy application, International conference on processing and manufacturing of advanced materials (THERMEC 2013), Rio Hotel, Las Vegas, USA, December 2-6, 2013.
Masaru Hori (PLENARY
) Plasma Medical Science for Cancer Therapy, 8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology, Hsinchu, Taiwan, December 20-22, 2013. PL02
General
H. Wang, K. Ishikawa, H. Horibe, K. Takeda, H. Kondo, M, Sekine, M. Hori. Real-time / in-situ electron spin resonance analysis of plasma surface interactions, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013. (POSTER
)
J. -D. Cao, Y. Lu, R. Kometani, J. -Y. Park, K. Ishikawa, K. Takeda, H. Kondo, M, Sekine, M. Hori. Etching characteristics of AlGaN in inductively coupled Cl2 plasmas, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013. (POSTER
)
H. Shimoeda, H. Kondo, K. Ishikawa, M. Hiramatsu, M. Sekine, M. Hori. Effects of Hydroxyl Radicals on Crystallographic and Electrinic Structures of Carbon Nanowalls, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013. (ORAL
)
T. Suzuki, K. Takeda, K. Ishikawa, H. Kondo, M, Sekine, M. Hori. Radical Density Control in H2/N2 Plasma Based on In-situ Monitoring with Vacuum Ultra Violet Absorption Spectroscopy, 16th International Workshop on Advanced Plasma Processing and Diagnostics, Okazaki Conference Center, Okazaki, Japan, January 26, 2013. (ORAL
)
L. Jia , W. Liu. Atmospheric pressure glow discharge in the frequency range based on the mechanism of ion capture , 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. P1021A (POSTER
)
R. Kometani, S. Chen, M. Liu, K. Ishikawa, H. Kondo, K. Takeda, T. Egawa, H. Amano, M. Sekine, M. Hori. High temperature plasma etching of GaN, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
K. Takeda, M. Hori. Effect of activated species on plane-direction dependence of Si oxidation in O2/Ar mixture plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Kondo, T. Hagino, K. Ishikawa, H. Kano, M. Sekine, M. Hori. Study on mechanism of ultrahigh speed synthesis of high crystallinity nanographene employing in-liquid plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
M. Suzuki, E. Murakami, K. Kawata, K. Takeda, M. Hori. Research on durability of the hydrophilc property of gas diffusion layer for polymer electrolyte fuel cell adapting atmospheric-pressure plasma treatment, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Iwata, H. Sakamoto, K. Takeda, M. Hori. Nonequilibrium atmospheric pressure plasma application for surface treatment of high density package substrate, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
J. Jolibois, K. Takeda, H. Tanaka, K. Ishikawa, M. Hori. Effect of biological solution on generation of radical species induced by nonequilibrium atmospheric pressure plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Tanaka, S. Iseki, K. Nakamura, M. Hayashi, H. Kondo, H. Kajiyama, H. Kano, F. Kikkawa, M. Hori. Nonequilibrium atmospheric pressure plasma selectively killed ovarian cancer cells and induced apoptosis, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
I. Yajima, M. Iida, K. Nakagawa, H. Kondo, M. Kumasaka, K. Takeda, M. Hori, H. Kano, M. Kato. Plasma-mediated modulation of element distribution in skin and skin cancer, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Setsuhara, K. Takenaka, M. Shiratani, M. Sekine, M. Hori. Plasma-biomaterials interaction analysis as a basis of fundamental processes in plasma medicine, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Mizuno, K. Ishikawa, H. Tanaka, H. Hashizume, T. Ohta, M. Ito, K. Takeda, H. Kondo, M. Sekine, M. Hori. Plasma-biological surface interaction investigated by electron spin resonance, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
K. Ishikawa, H. Mizuno, H. Tanaka, H. Hashizume, T. Ohta, M. Ito, K. Takeda, H. Kondo, M. Sekine, M. Hori. Electron spin resonance study of plasma-biological surface interaction for food hygiene, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Tanaka, M. Mizuno, K. Ishikawa, K. Nakamura, H. Kajiyama, H. Kano, F. Kikkawa, M. Hori. Plasma-activated medium selectively killed glioblastoma brain tumor cells and indueced apoptosis, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
J. Cao, R. Kometani, J. Park, K. Ishikawa, K. Takeda, H. Kondo, M. Sekine, M. Hori. Low-damage, high-accuracy plasma etching of Ga-compound semiconductors, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Hayashi, K. Ishikawa, M. Sekine, M. Hori. Excitation dissociations of c-C5F8 and c-C5HF7 etching gases, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
K. Asano, K. Ishikawa, M. Sekine, K. Takeda, H. Kondo, M. Hori . Mechanism for degradation of porous SiOCH low-K films by O2 plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Kondo, Y. Miyawaki, K. Takeda, H. Kondo, K. Ishikawa, T. Hayashi, M. Sekine, M. Hori. Gas-phase reaction model of Ar-diluted CHxFy plasmas, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Suzuki, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori. Subsequent temporal change of gaseous H and N radical density in H2/N2 plasma after air exposure and its control, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Hori. The change in surface morphology of Si at elevated temperature during the plasmaless Si etching with NO/F2 gas mixture, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Takeuchi, C. Corbella, S. Grosse-Kreul, A. Keudell, K. Ishikawa, H. Kondo, K. Takeda, M. Sekine, M. Hori. Real-time variation of sputtering yield of Ar ion for ArF photoresist during Ar plasma exposure, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Z. Liu, S. Chen, Y. Lu, R. Kometani, K. Ishikawa, H. Kano, K. Takeda, H. Kondo, M. Sekine, T. Egawa, H. Amano, M. Hori. Sequential exposure of N and H atoms for recovery of plasma-damaged GaN, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
M. Sekine, S. Amasaki, T. Takeuchi, K. Ishikawa, K. Takeda, H. Kondo, M. Hori. Investigation of Si etch reaction with F and O radicals using SF6/O2 plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
K. Yamakawa, H. Yamamoto, S. Takahashi, S. Den, S. Takashima, M. Hori. Rapid and low-temperature nitridation of austenitic stainless steel using electron beam excited plasma (EBEP) , 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
J. Kuki, L. Yu, H. Kondo, K. Ishikawa, M. Sekine, M. Hori . Effect of boron doping on crystalline structures and electrical properties of amorphous carbon films grown by radical-injection plasma-enhanced chemical vapor deposition, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Lu, A. Kobayashi, Y. Kim, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Study on precursor adsorption and reaction within SiO2 growth cycle of low temperature plasma-enhanced atomic layer deposition using in-situ ATR-FTIR, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
L. Ya, A. Fukushima, Y. Abe, Y. Kim, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori. Hydrogen radical injection plasma deposition of (110)-preferentially oriented microcrystalline silicon films, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
A. Fukushima, Y. Lu, Y. Abe, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Relation between gaseous radicals and μc-Si film property in SiH4/H2 plasma CVD, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
K. Sun, K. Takeda, S. Tajima, H. Kondo, K. Ishikawa, M. Sekine, M. Hori, H. Itoh. Construction of atmospheric pressure mist chemical vapor deposition technology for the all-printed electronic technology, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
N. Ebizuka, M. Sasaki, A. Bianco, F. Zerbi, Y. Hirahara, W. Aoki, M. Hori. Novel diffraction gratings fabricated by plasma nano-technologies, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Okamoto, H. Watanabe, K. Kubo, H. Kondo, N. Kaji, M. Tokeshi, M. Hori, Y. Baba. Superior properties of carbon nanowalls as cell scaffolds, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
L. Yu, J. Kuki, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Effect of Ar gas addition on photoconductive characteristics of amorphous carbon films synthesized by plasma-enhanced chemicalvapor deposition, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials , Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Cho, H. Kondo, K. Ishikawa, M. Sekine, M. Hiramatsu, M. Hori. Crystallographic and electrical properties of vertically-grown graphene sheets by CH4/H2 plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Shimoeda, H. Kondo, K. Takeda, K. Ishikawa, M. Hiramatsu, M. Sekine, M. Hori. Effects of morphological changes induced by hydrogen peroxide treatment on electrical properties of carbon nanowalls, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Horibe, H. Kondo, H. Kano, K. Ishikawa, M. Sekine, M. Hiramatsu, M. Hori. Formation and characteristics of Pt-Au nanoparticles supported on carbon nanowalls (CNWs) employing a supercritical fluid, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Watanabe, H. Kondo, Y. Okamoto, M. Sekine, M. Hiramatsu, Y. Baba, M. Hori. Effects of carbon nanowall scaffold and their chemical termination on cell culturing, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
M. Hori, K. Takeda, T. Ohta, M. Ito, N. Nishizawa. Measurement of species in non-equilibrium atmospheric pressure plasma using near infrared absorption spectroscopy with supercontinuum light, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
Y. Abe, A. Fukushima, Y. Kim, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Cavity ring down measurements of SiH3-behavior in SiH4/H2 plasma, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
S. Kajita, K. Takeda, K. Sakata, N. Ohno, M. Hori. Atomic hydrogen density measurement in toroidal plasma device NAGDIS-T by vacuum ultraviolet absorption spectroscopy, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Komuro, K. Takeda, K. Ishikawa, M. Sekine, H. Kondo, M. Hori. Absolute density of fluorine atom in capacitively coupled plasma employing hydro-fluorocarbon gases for highly selective SiO2 etching, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Hiraoka, T. Tsutsumi, H. Kato, K. Takeda, T. Ohta, H. Kondo, K. Ishikawa, M. Ito, M. Sekine, M. Hori. Measurement of carbon nanowalls / silicon substrate temperature by fourier-domain low-coherence interferometry, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
T. Tsutsumi, T. Hiraoka, K. Takeda, K. Ishikawa, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori. Real time temperature measurements of film-covered-substrate employing fourier domain low coherence interferometer during plasma processes, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Kano, K. Takeda, H. Kondo, S. Den, Y. Higashijima, M. Hori. The atmospheric pressure plasmas, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda, M. Hori. High H radical density produced by 1-m-length atmospheric pressure microwave plasma system, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
J. Kularatne, H. Kano, M. Ito, T. Ohta, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori. Application of atmospheric pressure plasma in element analysis of agricultural products, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, Nagoya University, Nagoya, Japan, January 28-February 1, 2013. (
)
H. Hashizume, T. Ohta, M. Ito, F. Jia, K. Takeda, K. Ishikawa, M. Hori. Effects of Reactive Oxygen Species on Inactivation of Penicillium Digitatum Spores Dependent on Exposure Distance using an Atmospheric-pressureOxygen Radical Source, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
R. Shimane, H. Asano, S. Kumagai, M. Hori, M. Sasaki. Local micro-plasma irradiation using MEMS nozzles, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
H. Kato, H. Hashizume, T. Ohta, M. Hiramatsu, M. Hori, M. Ito. Raman spectra variation of microorganisms treated, by atmospheric-pressure oxygen-radical source, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
Minoru Sasaki, D. Yasumatsu, H. Matsuyama, S. Kumagai, K. Takeda, N. Ebizuka, M. Hori. Transportable Micro-plasma VUV Light Source System, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
H. Tanaka, M. Mizuno, K. Ishikawa, K. Nakamura, H. Kajiyama, H. Kano, F. Kikkawa, M. Hori. Characterization of anti-tumor effect of glioblastoma brain tumor cells by plasma-activated medium, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
N. Ebizuka, M. Hori, Y. Higashijima. Vacuum ultraviolet radical monitor ~plasma diagnostics by optical technology~, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
R. Kometani, L. Michael, K. Ishikawa, K. Takeda, H. Kondo, H. Amano, M. Sekine, M. Hori. Chlorine plasma etching of GaN at high temperature, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
T. Hiraoka, H. Kato, T. Tsutsumi, T. Ohta, M. Ito, K. Takeda, H. Kondo, M. Hori. Temperature measurement of carbon nanowall / silicon substrate using super-continuum light source on low-coherence interferometry, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
T. Hayashi, K. Ishikawa, M. Sekine, M. Hori. Dissociative properties of etching gase, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
Y. Kondo, Y. Miyawaki, K. Takeda, K. Ishikawa, H. Kondo, T. Hayashi, M. Sekine, M. Hori. Effects of hydrogen contained in fluorocarbon gas molecules for dielectric film etching proces, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
J. S. Kularatne, H. Kano, M. Ito, T. Ohta, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Influence of N2 inclusion to Ar AP plasma in atomization, 6th International Conference on PLAsma Nano Technology and Science, Gero Synergy Center ACTIVE, Japan, February 2-3, 2013. (
)
A. Ando, T. Ohta, K. Takeda, M. Ito, M. Hiramatsu, T. Suzuki, Y. Ando, M. Hori. Optical emission spectroscopy of arc plasma using Ni-Y containing carbon electrode, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013. May 25, 13:00-13:15 (ORAL
)
L. Jia, J. Kuki, L. Yu, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Effect of boron doping on amorphous carbon films grown by radical-injection plasma-enhanced chemical vapor deposition, 17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Sungkyunkwan University, Suwon, Korea, May 23-25, 2013. May 25, 12:00-12:15 (ORAL
)
T. Tsutsumi, K Takeda, K. Ishikawa, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori. Effect of thin films on wafer temperature during plasma processes investigated by non-contact temperature measurement technique, XXXI International Conference on Phenomena in Ionized Gases (ICPIG), Granada Congress Centre, Spain, July 14-19, 2013. PS4-013 (POSTER
)
T. Ohta, H. Hashizume, M. Ito, K. Takeda, K. Ishikawa, M. Hori. Inactivation of microorganisms in liquid exposed by oxygen radical source, XXXI International Conference on Phenomena in Ionized Gases (ICPIG), Granada Congress Centre, Spain, July 14-19, 2013. PS3-102 (POSTER
)
M. Hori, H. Watanabe, H. Kondo, Y. Okamoto, M. Hiramatsu, M. Sekine, Y. Baba. Cell-culturing scaffold application of carbon nanowall (CNW), XXXI International Conference on Phenomena in Ionized Gases (ICPIG), Granada Congress Centre, Spain, July 14-19, 2013. PS2-102 (POSTER
)
J. Kularatne, J. Jolibois, H. Kano, M. Ito, T. Ohta, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Detection of metal elements in soil using atmospheric pressure plasma, 12th Asia Pacific Physics Conference of AAPPS and The third Asia-Europe Physics Summit (APPP), International Conference Halls, Makuhari Messe Chiba, Japan , July 14-19, 2013. D2-Ptu-10 (POSTER
)
J. Jolibois, J. Kularatne, H. Kano, M. Ito, H. Kondo, K. Ishikawa, M. Hori. Effect of Hexane on the synthesis of nanographene using liquid plasma, 12th Asia Pacific Physics Conference of AAPPS and The third Asia-Europe Physics Summit (APPP), International Conference Halls, Makuhari Messe Chiba, Japan , July 14-19, 2013. D2-PTh-6 (POSTER
)
A. Ando, T. Ohta, K. Takeda, M. Ito, M. Hiramatsu, T. Suzuki, S. Inoue, Y Ando, M. Hori. Optical emission spectroscopy of arc plasma using Ni-Y catalyst for synthesizing single-walled carbon nanotubes, 12th Asia Pacific Physics Conference of AAPPS and The third Asia-Europe Physics Summit (APPP), International Conference Halls, Makuhari Messe Chiba, Japan , July 14-19, 2013. D2-Ptu-16 (POSTER
)
H. Shimoeda, H. Kondo, K. Ishikawa, M. Hiramatsu, M. Sekine, M. Hori. Crystallographic and chemical modification of carbon nanowalls by radical oxidation, 12th Asia Pacific Physics Conference of AAPPS and The third Asia-Europe Physics Summit (APPP), International Conference Halls, Makuhari Messe Chiba, Japan , July 14-19, 2013. A3-3-O4 (ORAL
)
Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Kae Nakamura, Hiroaki Kajiyama, Hiroyuki Kano, Fumitaka Kikkawa, Masaru Hori. Plasma-activated medium induced apoptosis on glioblastoma brain tumor cells by inhibiting growth/survival signaling 21th International Symposium on Plasma Chemistry (ISPC), Cairns Convention Centre, Australia, August 4-9, 2013. (POSTER
)
Masaru Hori, Yusuke Abe, Atsushi Fukushima, Ya Lu, Sho Kawashima, Keita Miwa, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine. Hydrogen radical-injection plasma fabricated microcrystalline silicon thin film for solar cells, 21th International Symposium on Plasma Chemistry (ISPC), Cairns Convention Centre, Australia, August 4-9, 2013. PS4-013 (POSTER
)
Kenji Ishikawa, Ryosuke Kometani, Keigo Takeda, Hiroki Kondo, Makoto Sekine, Masaru Hori. Surface Analysis of GaN at Elevated Substrate Temperature, 10th International Conference on Nitride Semiconductors (ICNS10), Wasington, USA, August 25-30, 2013. AP.1.61. (POSTER
)
Makoto Sekine, Zecheng Liu, Shang Chen, Ryosuke Kometani, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Masaru Hori. Recovery of Plasma-Damaged GaN by in situ Radical Exposure, 10th International Conference on Nitride Semiconductors (ICNS10), Wasington, USA, August 25-30, 2013. AP.1.61. (POSTER
)
Hiroko Iguchi, Ryosuke Kometani, Michael Liu, Kenji Nakashima, Takahiro Kozawa, Kenji Ishikawa, Makoto Sekine, Masaru Hori. Effects of High Temperature Etching on GaN using by Cl2 Plasma, 10th International Conference on Nitride Semiconductors (ICNS10), Wasington, USA, August 25-30, 2013. DP.1.20. (POSTER
)
J. Park, J. Cao, Z. Liu, T. Kako, K. Ishikawa, Y. Setsuhara, K. Takeda, H. Kondo, M. Sekine, M. Hori. Plasma Etching of Ga-based Compound Semiconductor, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-69 (POSTER
)
T. Hayashi, K. Ishikawa, M. Sekine, M. Hori. Quantum Chemical Investigations for Dissociation Paths of Fluoro-methane Compounds , International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-64 (POSTER
)
Y. Kondo, Y. Miyawaki, K. Takeda, H. Kondo, K. Ishikawa, T. Hayashi, M. Sekine, M. Hori. Control of Gas Phase Reaction in Etching Plasmas Employing Hydro-fluorocarbon Gases, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-61 (POSTER
)
K. Sun, K. Takeda, H. Itoh, H. Kondo, K. Ishikawa, M. Sekine, M. Hori. Low-temperature Insulating Film Formation with Plasma Enhanced Mist Chemical Vapor Deposition, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-57 (POSTER
)
J. Jolibois, J. Kularatne, H. Kano, M. Ito, H. Kondo, K. Ishikawa, M. Hori. Effect of Hydrogen Peroxide on Carbon Materials Produced by Gas-liquid Plasma, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-56 (POSTER
)
S. Tajima, T. Hayashi, M. Sasaki, K. Ishikawa, M. Sekine, M. Hori. Fabricating the Smooth Chemically Dry Etched Si Surface for MEMS Devices, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-43 (POSTER
)
T. Ohta, T. Takayoshi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori, M. Ito. Non-contact Temperature Monitoring of Substrates Using Optical Interferometry on Plasma Processing, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. P-12 (POSTER
)
Y. Miyawaki, H. Wang, Y. Kondo, K. Ishikawa, K. Takeda, S. Tajima, H. Kondo, M. Sekine, H. Horibe, M. Hori. Analysis of Fluorocarbon Gas Plasma Surface Interactions Using Real-time/In-situ Electron Spin Resonance, International Symposium on Dry Process (DPS), Ramada Plaza Jeju Hotel, Jeju, Korea, August 29-30, 2013. B-3 (ORAL
)
S. Tajima, M. Hori. Effect of Neutral Species Generated by the micro Hollow-cathode Discharge Radical Source On the Modification of A549 Cell Viability, 9th Asian-european International Conference On Plasma Surface Enginnering (AEPSE), Ramada Plaza Jeju Hotel, Jeju, Korea, August 25-30, 2013. P4-42 (POSTER
)
M. Hiramatsu, Y. Nihashi, H. Kondo, M. Hori. Nucleation control of self-organized vertical nano-graphenes using inductively coupled plasma enhanced chemical vapor deposition, The European Materials Conference European Materials Research Society Fall Meeting Scientific/Technical Symposia, Warsaw University of Technology, Warsaw, Poland, September 16-20, 2013. G-I 4 (ORAL
)
H. Kondo, K. Yasuda, K. Ishikawa, M. Sekine, M. Hiramatsu, and M. Hori. Gradual transition of chemical structures at initial growth stage of carbon nanowalls, The European Materials Conference European Materials Research Society Fall Meeting Scientific/Technical Symposia, Warsaw University of Technology, Warsaw, Poland, September 16-20, 2013. G-IV 3 (ORAL
)
M. Ito, H. Hashizume, T. Ohta, K. Takeda, K. Ishikawa, M. Hori. Reaction mechanism between cell membranes of P. digitatum spores and oxygen radicals, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. MR1-53 (POSTER
)
H. Suzuki, S. Nakano, H. Itoh, M. Sekine, M. Hori, H. Toyada . Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. CT1-47 (POSTER
)
T. Ohta, H. Hashizume, M. Ito, K. Takeda, M. Hori. Growth control of budding yeast cells by oxygen-radical treatment, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. LW3-7 (ORAL
)
M. Hori, H. Tanaka, M. Mizuno, K. Nakamura, H. Kajiyama, K. Takeda, K. Ishikawa, H. Kano, F. Kikkawa. Plasma-activated medium induced apoptosis on tumor cells, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. LW3-3 (ORAL
)
Y. Miyawaki, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, A. Ito, H. Matsumoto, M. Hori. Reduction of Mechanism of Surface Roughness on ArF-Photoresist Using C5HF7 Gas Plasma, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. LW1-5 (ORAL
)
K. Takeda, K. Ishikawa, H. Tanaka, H. Kano, M. Sekine, M. Hori. Measurement of actived species generated by AC power excited non-equilibrium atmospheric pressure Ar plasma jet with Air engulfment, 66th Annual Gaseous Electronic Conference (GEC), Westin Hotel Princeton, Princeton New Jersey, USA, September 30-4, 2013. DT2-4 (ORAL
)
T. Takeuchi, Y. Zhang, K. Ishikawa, M. Sekine, Y. Setsuhara, K. Takeda, H. Kondo, M. Hori. PlasmaInduced Surface Roughness of ArF Photoresist Examined by Plasma-Beam Processes, 60th International Symposium American Vacuum Society (AVS), Long Beach, California, USA, October 27-1, 2013. PS-WeM2 (ORAL
)
D. Cao, Y. Lu, R. Kometani, J. Park, K. Ishikawa, K Takeda, H. Kondo, M. Sekine, M. Hori. Etching Characterristics of AlGaN and GaN in Inductively Coupled Cl2 Prasma, 60th International Symposium American Vacuum Society (AVS), Long Beach, California, USA, October 27-1, 2013. PS-TuP11 (POSTER
)
R. Kometani, K. Ishikawa, K Takeda, H. Kondo, M. Sekine, M. Hori. High Temperature Etching of GaN Preserving Smooth and Stoichiometric GaN Surface, 60th International Symposium American Vacuum Society (AVS), Long Beach, California, USA, October 27-1, 2013. PS-ThA6 (ORAL
)
I. Sakai, S. Amasaki, T. Takeuchi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine N. Sakurai, H. Hayashi, T. Ohiwa, M. Hori. Reaction Mechanism at the Sidewall of Through Si via (TSV) Etching by SF6/O2/SiF4 Plasma, 60th International Symposium American Vacuum Society (AVS), Long Beach, California, USA, October 27-1, 2013. PS2-TuA11 (ORAL
)
T. Tsutsumi, T. Ohta, K. Ishikawa, K Takeda, H. Kondo, M. Sekine, M. Hori, M. Ito. Non-contact measurements of substrate-temperature by frequency-domain low coherence interferometry , 60th International Symposium American Vacuum Society (AVS), Long Beach, California, USA, October 27-1, 2013. PS1-TuA10 (ORAL
)
T. Towatari, H. Hashizume, T. Ohta, M. Hori, M. Ito. Inactivation of microorganism in liquid phase treated with neutral oxygen radical source, 1st International Conference on Surface Engineering (ICSE2013), Busan, Korea, November 18-21, 2013. TUEAM03-4 (ORAL
)
H. Kato, T. Ohta, K. Takeda, H. Hashizume, M. Hiramatsu, M. Hori, M. Ito. Vibration analysis of biological samples treaated with plasma using multiplex coherent anti- Stokes Raman scattering spectroscopy, 1st International Conference on Surface Engineering (ICSE2013), Busan, Korea, November 18-21, 2013. MONPM03-4 (ORAL
)
H. Kato, T. Ohta, H. Hashizume, M. Hiramatsu, M. Hori, M. Ito. Molecular Stracture Analysis of Microorganisms by Raman Spectroscopy, 8th Asia-Pacfic International Symposium on the Basics and Applications of Plasma Technology, Hsinchu, Taiwan, December 20-22, 2013. P1-01 (POSTER
)
M. Hiramatsu, H. Kondo, M. Hori. Carbon Nanowalls: Growth Control and their Clean Applications, 8th Asia-Pacfic International Symposium on the Basics and Applications of Plasma Technology, Hsinchu, Taiwan, December 20-22, 2013. (ORAL
)
T. Ohta, H. Hashizume, M. Ito, T. Takeda, K. Ishikawa, M. Hori. Gas phase diagnostics of atmospheric oxygen radical sourse on inactivation of P. digitatum spores, 8th Asia-Pacfic International Symposium on the Basics and Applications of Plasma Technology, Hsinchu, Taiwan, December 20-22, 2013. O10-03 (ORAL
)
T. Towatari, H. Hashizume, T. Ohta, M. Hori, M. Ito. Inactivation of Escherichia coli in liquid phase treated with neutral oxygen radical sourse, 8th Asia-Pacfic International Symposium on the Basics and Applications of Plasma Technology, Hsinchu, Taiwan, December 20-22, 2013. O1-01 (ORAL
)
R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki. Localized Microplasma Generation in MEMS Gas Channel, 20th International Display Workshops, Sapporo Convention Center, Sapporo, Japan, December 4-6, 2013. MEET5-2 (ORAL
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