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2000

  1. K. Teii, H. Ito, M. Hori, T. Takeo, and T.Goto
    Kinetics and Role of C, O, and OH in Low-Pressure Nanocrystalline Diamond Growth
    Journal of Applied Physics, Vol. 87 (9) (April, 2000) pp. 4572-4579,
    DOI: 10.1063/1.373104

  2. K. Teii, M. Hori, T. Goto, and N. Ishii
    Precursors of Fluorocarbon Film Growth Studied by Mass Spectrometry
    Journal of Applied Physics, Vol. 87 (10) (April, 2000) pp. 7185-7190,
    DOI: 10.1063/1.372967

  3. H. Ito, K. Teii, H. Funakoshi, M. Hori, and T. Goto
    Loss Kinetics of Carbon Atoms in Low-Pressure High Density Plasmas
    Journal of Applied Physics, Vol. 88 (8) (September, 2000) pp. 4537-4541,
    DOI: 10.1063/1.1314307

  4. S. Sumiya, Y. Mizutani, R. Yoshida, M. Hori, T. Goto, T. Tsukada, and S. Samukawa
    Plasma Diagnostics and Low-Temperture Deposition of Microcrystalline Silicon films in Ultrahigh-Frequency Silane Plasma
    Journal of Applied Physics, Vol. 88 (33) (June, 2000) pp. 576-581,
    DOI: 10.1063/1.373698

  5. S. Tada, S. Takashima, M. Ito, T. Goto, and Y. Sakamoto
    Measurement and Control of Absolute Nitrogen Atom Density in an Electron Beam Excited Plasma Using Vacuum Ultraviolet Absorption Spectroscopy
    Journal of Applied Physics, Vol. 88 (33) (July, 2000) pp. 1756-1759,
    DOI: 10.1063/1.1305559

  6. K. Teii, M. Hori, M. Ito, T. Goto, and N. Ishii
    Study on Polymeric Neutral Species in High-Density Fluorocarbon Plasmas
    Journal of Vacuum Science Technology A, Vol. 18 (1) (January, 2000) pp. 1-9,
    DOI: 10.1116/1.582150

  7. H. Ohta, A. Nagashima, M. Ito, M. Hori, and T. Goto
    Formation of Silicon Nitride Gate Dielectric Films at 300oC Employing Radical Chemical Vapor Depostion
    Journal of Vacuum Science Technology B, Vol. 18 (5) (October, 2000) pp. 2486-2490,
    DOI: 10.1116/1.1289549

  8. K. Teii, M. Hori, and T. Goto
    Codeposition on Diamond Film Surface During Reactive Ion Etching In SF6 and O2 Plasmas
    Journal of Vacuum Science Technology A, Vol. 18 (6) (November, 2000) pp. 2779-2784,
    DOI: 10.1116/1.1316098

  9. A. Kono, S. Takashima, M. Hori, T. Goto
    マイクロ放電光源を用いたプラズマ吸収分光計測
    Journal of Plasma and Fusion Research, Vol. 76 (5) (May, 2000) pp. 460-464,
    DOI:

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