Dirk Hegemann, Enrico Korner, Shang Chen, Jan Benedikt, and Achim von KeudellFunctional Plasma Polymers Deposited in Capacitively and Inductively Coupled Plasmas 10.1063/1.3681382 S. Iseki, K. Nakamura, M. Hayashi, H. Tanaka, H. Kondo, H. Kajiyama, H. Kano, F. Kikkawa, and M. HoriSelective killing of ovarian cancer cells through induction of apoptosis by nonequilibrium atmospheric pressure plasma 10.1063/1.3694928 Kenji Ishikawa, Hiroko Moriyama, Hiromasa Tanaka, Kazuhiro Tamiya, Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Sachiko Iseki, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru HoriReal-time in situ electron spin resonance measurements on fungal spores of Penicillium digitatum during exposure of oxygen plasmas 10.1063/1.4733387 Yusuke Abe, Atsushi Fukushima, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru HoriCritical flux ratio of hydrogen radical to film precursor in microcrystalline silicon deposition for solar cells 10.1063/1.4764065 Tatsuya Hagino, Hiroki Kondo, Kenji Ishikawa, Hiroyuki Kano, Makoto Sekine, and Masaru HoriUltrahigh-Speed Synthesis of Nanographene Using Alcohol In-Liquid Plasma 10.1143/APEX.5.035101 Y. Hara, K. Takeda, K. Yamakawa, S. Den, H. Toyoda, M. Sekine, and M. HoriNitriding of Polymer by Low Energy Nitrogen Neutral Beam Source 10.1143/APEX.5.035801 Shang Chen, Unhi Honda, Tatsunari Shibata, Toshiya Matumura, Yutaka Tokuda, Kenji Ishikawa, Masaru Hori, Hiroyuki Ueda, Tsutomu Uesugi, and Tetsu KachiAs-grown deep-level defects in n-GaN grown by metalｨCorganic chemical vapor deposition on freestanding GaN 10.1063/1.4748170 Tsuyoshi Yamaguchi, Tetsuya Komuro, Chishio Koshimizu, Seigo Takashima, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru HoriDirect current superposed dual-frequency capacitively coupled plasmas in selective etching of SiOCH over SiC 10.1088/0022-3727/45/2/025203 S. Samukawa, M. Hori, S. Rauf, K. Tachibana, P. Bruggeman, G. Kroesen, J. C. Whitehead, A. B. Murphy, A. F. Gutsol, S. Starikovskaia, U. Kortshagen, J. P. Boeuf, T. J. Sommerer, M. J. Kushner, U. Czarnetzki, and N. MasonThe 2012 Plasma Roadmap 10.1088/0022-3727/45/25/253001 K. Cho, K. Takenaka, Y. Setsuhara, M. Shiratani, M. Sekine, and M. HoriInvestigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation 10.1016/j.tsf.2012.05.061 K. Cho, K. Takenaka, Y. Setsuhara, M. Shiratani, M. Sekine, and M. HoriEffects of Irradiation with Ions and Photons in Ultraviolet-Vacuum Ultraviolet Regions on Nano-Surface Properties of Polymers Exposed to Plasmas 10.1143/JJAP.51.01AJ02 S. Kumagai, A. Hikita, T. Iwamoto, T. Tomikawa, M. Hori, and M. Sasaki Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing 10.1143/JJAP.51.01AB04 Kumagai, H. Asano, M. Hori, and M. Sasaki Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma 10.1143/JJAP.51.01AA01 H. Watanabe, H. Kondo, M. Sekine, M. Hiramatsu, and M. HoriControl of Super Hydrophobic and Super Hydrophilic Surfaces of Carbon Nanowalls Using Atmospheric Pressure Plasma Treatments 10.1143/JJAP.51.01AJ07 Hiroshi Yamamoto, Hiroki Kuroda, Masafumi Ito, Takayuki Ohta, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, and Masaru HoriFeature Profiles on Plasma Etch of Organic Films by a Temporal Control of Radical Densities and Real-Time Monitoring of Substrate Temperature 10.1143/JJAP.51.016202 Masanaga Fukasawa, Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Hiroyasu Matsugai, Takayoshi Honda, Masaki Minami, Fumikatsu Uesawa, Masaru Hori, and Tetsuya TatsumiVacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation 10.1143/JJAP.51.026201 Toshio Hayashi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Akihiro Kono, and Koukou SuuQuantum Chemical Investigation of Si Chemical Dry Etching by Flowing NF3 into N2 Downflow Plasma 10.1143/JJAP.51.026505 S. Takahashi, R. Kawauchi, S. Takashima, S. Den, T. Katagiri, H. Kano, T. Ohta, M.i Ito, T. Suzuki, K. Takeda, and M. HoriAn Autonomously Controllable Plasma Etching System Based on Radical Monitoring 10.1143/JJAP.51.076502 M. Inoue, T. Ohta, N. Takota, S. Tsuchitani, M. Ito, S. Takashima, K. Yamakawa, H. Kano, K. Takeda, and M. HoriLine-Profiles and Translational Temperatures of Pb Atoms in Multi-Micro Hollow Cathode Lamp Measured by Diode Laser Absorption Spectroscopy 10.1143/JJAP.51.086301 M. Inoue, T. Ohta, N. Takota, S. Tsuchitani, M. Ito, S. Takashima, K. Yamakawa, H. Kano, K. Takeda, M. HoriProperties of Indium?Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp 10.1143/JJAP.51.116202 Shang Chen, Kenji Ishikawa, Yi Lu, Ryosuke Kometani, Hiroki Kondo, Yutaka Tokuda, Takashi Egawa, Hiroshi Amano, Makoto Sekine, and Masaru HoriIndividual Roles of Atoms and Ions during Hydrogen Plasma Passivation of Surface Defects on GaN Created by Plasma Etching 10.1143/JJAP.51.111002 S. Chen, Y. Lu, R. Kometani, K. Ishikawa, H. Kondo, Y. Tokuda, M. Sekine, and M. HoriPhotoluminescence recovery by in-situ exposure of plasma-damaged n-GaN to atomic hydrogen at room temperature 10.1063/1.4729448 R. Shimane, S. Kumagai, M. Hori, M. SasakiMINIMIZING PLASMA IRRADIATION AREA BY MICRO-NOZZLE DEVICE TOWARDS SINGLE CELL TREATNENT 10.1049/mnl.2012.0555 M. Ito, T. Ohta, and M. HoriPlasma Agriculture 10.3938/jkps.60.937 Hiromasa Tanaka, Sachiko Iseki, Kae Nakamura, Moemi Hayashi, Hiroki Kondo, Hiroaki Kajiyama, Hiroyuki Kano, Fumitaka Kikkawa, and Masaru HoriSelective Killing of Ovarian Cancer Cells through Induction of Apoptosis by a Nonequilibrium Atmospheric Pressure Plasma 10.1557/opl.2012.927 Kenji Ishikawa, Hiroko Moriyama, Kazuhiro Tamiya, Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Sachiko Iseki, Hiromasa Tanaka, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru HoriElectron Spin Resonance (ESR) Observation of Radicals on Biological Organism Interacted with Plasmas 10.1557/opl.2012.928 新井 祐, 渡邉 誠, 河野 昭彦, 山岸 忠明, 石川 健治, 堀 勝, 堀邊 英夫タングステン加熱触媒体により生成した水素ラジカルによるレジスト用ベースポリマーの分解除去 10.1295/koron.69.266 岩田 義幸, 坂本 一, 竹田 圭吾, 堀 勝トリフルオロメチルトリフルオロビニルエーテル混合ガスを用いた60Hz非平衡大気圧プラズマによるビア底残渣のドライデスミア 10.4139/sfj.63.247 堀 勝, 鈴木 俊哉, 竹田 圭吾, 近藤 博基, 石川 健治, 関根 誠プラズマナノテクノロジーによる10mmサイズ、超高アスペクト比有機ナノピラーの室温近傍形成とフレキシブルディスプレイへの応用